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TCAD - Process Simulation
Virtually model the fabrication process of semiconductor devices
Process simulation deals with modeling the fabrication steps of semiconductor devices such as transistors and focuses on front end of line manufacturing steps. Back-end-of-line steps are handled with tools like Sentaurus Interconnect.
Powerful numerical algorithms simulate process steps like implantation, diffusion and dopant activation, etching, deposition, oxidation, and epitaxial growth in different semiconductor materials. Process conditions such as the ambient chemical composition, temperature, and pressure during individual fabrication steps are typical inputs. The final output is a 2D or 3D device structure which can be used for device simulation.
草榴社区 has four process simulation tools: Sentaurus Process, Taurus TSUPREM-4, Sentaurus Topography 3D, and Sentaurus Lithography.