%PDF-1.6 % 223 0 obj <> endobj 243 0 obj <>/Filter/FlateDecode/ID[<50D0A4822AB8B2110A00700A0439FF7F>]/Index[223 38]/Info 222 0 R/Length 105/Prev 349023/Root 224 0 R/Size 261/Type/XRef/W[1 3 1]>>stream hbbd```b``"6َ 5D2قI/1^""AT;$c)ͨ"y@i&x4L& +l/#M  P!L endstream endobj startxref 0 %%EOF 260 0 obj <>stream hb```c``Zp X['W,OIN,'i1ҁC3:%X՟i! fd``rdeeb3RJL1Bqg)i&h{ eH1jB14H310ʀY')ye !H endstream endobj 224 0 obj <>/Metadata 29 0 R/Outlines 51 0 R/Pages 221 0 R/StructTreeRoot 52 0 R/Type/Catalog/ViewerPreferences<>>> endobj 225 0 obj <>/PageWidthList<>>>>>/Resources<>/ExtGState<>/Font<>/ProcSet[/PDF/Text/ImageC]/Properties<>/XObject<>>>/Rotate 0/StructParents 0/TrimBox[0.0 0.0 594.0 792.0]/Type/Page>> endobj 226 0 obj <>stream hޤV[OH+jE~DKhaY)M`5#ۈwNfK kQL\n9?E^k&c& 'n)?i7L:0) H 7<ڒ֙e3>&0.Iɖ MϮ~$.eVGvy;&L.2#ٲeO|KT-Run'dU?jQ(GeSOiwY݃|β^Ddw̗8euU3| ou?(*GeHŬ n=81K ,@Cg%I!@;hr&3gX@,!t55Z0j9mq=PC7خy-6V{[W?0A [N8wU:Io~efy9t?mfwWv;fSVf `q endstream endobj 227 0 obj <>stream H\͊@>E-I7d1?Lfh%#LTY'hVnwKOCs;u};pI^k\1I:˾? IUGy{ڴ1<'鷩 Sןӯ٥8 .sk)}ǯ%ton1y+2ІX7asH,kW}c>>>>>>>>>>ʎLE2STd*3LE++Sinn4x= FOi4x= FOi\E#sg ʱ nu{MS^˖^vTׇ]?K 0!a endstream endobj 228 0 obj <>stream H\n@E^&bB"H,aKY7H>sK4vҟN]N:ܦ&c8w}\1I:˾? IUWx{ش1<&鏩 Sןßѥ8~Kgڵ\,{ڷz7ߟw2ІX7asH,֮zuy*psCg3$-y ޑwW+Z!rA.+ ,d&0G#s9Ax+Y%%%%%%%%%%%9+YyxxxxxxxxxxTd*3LE2STd*3ud_E_e_E_l sPA9sPA9s0o7o7o7K>stream HWYo~ׯ8"`Q\E(i M j$0&a+A,|ơ9<,)ff˟:ۉT?,8Vf?'-=|QuTZ.!S"wmǔ:UNJIfo/gv1mjQr<\k!8W%Fpl\LRZ+ ױ,hz|2Tbvi.#=7 sѢ#?V+OB=hNYm>XHJr+Mow(?=)YZq8ɅΪvՁ,Bpv@s\CT*E[i_."! j_DlZ?+Tn9$$"oHE5֒cȫ}rVj,AemZ]Q`* Dt!T=ͪ\j huC]HeoΖqd.SR@') <'<Cyé@J-r.7Fv+lψ c)+Ğ"iYpGVWMlXU9ʪ??׳w5;_"?.l!->:SԬ׈ij>z~!hWTw%˔>t& !+ ;DVMm/q β[*r}^yS[|\ČW%Kez\es}oHeU8 +0}FazD8>stream H\n0 \/*Z(I+!;hl@Fg㪓 _DEy,]7A[m皀p Ωm Mgj۾*j'K* q 3<=7W*z ]髨VU7G7lIu-a벡nwsފ;48bUCv+tͿHإuPY̗7O'DOb9Nw;T8ešy/'NE3eM]&bԬESM͚Z45kj#lE_> (|d5T̈7ތk8_# {3Ͱ7#~h"߫W^[,u(?+y1< endstream endobj 231 0 obj <>stream HyTSwoɞc [5laQIBHADED2mtFOE.c}08׎8GNg9w߽'0 ֠Jb  2y.-;!KZ ^i"L0- @8(r;q7Ly&Qq4j|9 V)gB0iW8#8wթ8_٥ʨQQj@&A)/g>'Kt;\ ӥ$պFZUn(4T%)뫔0C&Zi8bxEB;Pӓ̹A om?W= x-[0}y)7ta>jT7@tܛ`q2ʀ&6ZLĄ?_yxg)˔zçLU*uSkSeO4?׸c. R ߁-25 S>ӣVd`rn~Y&+`;A4 A9=-tl`;~p Gp| [`L`< "A YA+Cb(R,*T2B- ꇆnQt}MA0alSx k&^>0|>_',G!"F$H:R!zFQd?r 9\A&G rQ hE]a4zBgE#H *B=0HIpp0MxJ$D1D, VĭKĻYdE"EI2EBGt4MzNr!YK ?%_&#(0J:EAiQ(()ӔWT6U@P+!~mD eԴ!hӦh/']B/ҏӿ?a0nhF!X8܌kc&5S6lIa2cKMA!E#ƒdV(kel }}Cq9 N')].uJr  wG xR^[oƜchg`>b$*~ :Eb~,m,-ݖ,Y¬*6X[ݱF=3뭷Y~dó ti zf6~`{v.Ng#{}}jc1X6fm;'_9 r:8q:˜O:ϸ8uJqnv=MmR 4 n3ܣkGݯz=[==<=GTB(/S,]6*-W:#7*e^YDY}UjAyT`#D="b{ų+ʯ:!kJ4Gmt}uC%K7YVfFY .=b?SƕƩȺy چ k5%4m7lqlioZlG+Zz͹mzy]?uuw|"űNwW&e֥ﺱ*|j5kyݭǯg^ykEklD_p߶7Dmo꿻1ml{Mś nLl<9O[$h՛BdҞ@iءG&vVǥ8nRĩ7u\ЭD-u`ֲK³8%yhYѹJº;.! zpg_XQKFAǿ=ȼ:ɹ8ʷ6˶5̵5͵6ζ7ϸ9к<Ѿ?DINU\dlvۀ܊ݖޢ)߯6DScs 2F[p(@Xr4Pm8Ww)Km endstream endobj 232 0 obj <>stream HytUǿo^ !! Y_{J6B"E0AYeRQ*5mOJp*vIPZY<ּ^H{z9{̝;3ߙ}`)Vɘ%TSe5ˬ :.QY7}ؙ kNeӾ.(*_9ZpߦSp.ڡ@ȱew|=Mq-1% h}]~Bͧ+h}iʳljeZ?1xky&\n: 򳼈c#6祼>nf?୼ @ ,>Htn8$ݥKO7Ŏ$J,TS*Fb%N%AqT$Ǥ.7ʪTI&ޗ,lɑ~;/R2H$d !⒡2LDød>׽ė;⚌u)GpCJ𕌖yy 2F2N D2^ $dL#s.aNR+d4L0IO)bi'T[#r6 edfDFE;Sy!#\옰1J/v\|Qۙ}PV!gf9">+UK kI!gk K7̮lXU0>7w|AU0!7o\;z4xKVo8ikuUKKW1i1@"eSd1tPaZR蓂]AMin"3/ |$&H %-"jZjY]qڕnuήuFۭ]Ng[gwgk3B_lf|={~؄I,ETr_ZJBא (.ޡ:4_N8XZ @a9?FH$aU0<{Tߪcjq-wׯ& zeC^JK,]|x&g{(jkvd†㽸kSh1MlJ}-Vqv r@aM:`%Gѹ|:.[Y АQx2!t6̣YkDaG s\T\#}KQ#-Є\Xwq׌/if [*׋r_s +#_޸{ m`s*'1l(/\} YaϚ@ F XI4VAy紧Xo&K摳:*0O4+lM-bTFWsr[ļ#;rr@l-ij*6XJ}50C]Q@k"O] ,bA1%5f0 7%gojm˵#>6 8mLpXJ/CZ!VH30QQދ{zk7.^dWqf=oEju[\pT5 `V¾{{& o67\X)t裩gmp ݖg+-qΞ7Guo#Z6KAx0\O@c?Jz2 T*d͔TNXsȥ ];,.NG{Z^MJ)'Ii$q8kLS2P GS S?ik*P,6Ba咈O,X T<>j?cO;ƮR>QXN%ܹ.6Z_jooh~j/Jxd;!(ɇ&]B pl3ÒMҗ@pzlCdO|rZFACzc[>SaOJ[n>sQ{˂lL@,*+Hg͕x}K#ʠRP.Z蜠w4i]r܇wl/T|>7(j6.%IdQiTV?/kg̤& Cg=61igy9GmJ+BO㧐c IO4k᳝/I6~m y_3'ya!KFvefvmڤIʢcq6{*"g̊Bp@StfZ~n (f!v|mJ$X%`- ȅO+r<B&0 „4eyRaD=$cEVD=$Ka31LPu v ގh%n NEVwFS+E2}Jll5U(Q}60c6ˌKtXfKva{CN0%Z#Q'79/Vhb"EicNfHf^CFTw:g J\|Lj@_V} ˴SAB*5c# !+ȕT֦?y{jMh+`CTS z X, XՊZ)[L"-Ɨ=*uƐ&*2 dICi \oj:kZڒ(2v̱ҙ,VBc1n=bC~R$?@F( ED4&y_҄YUr[;قxz=nKyYi}C&DCk$߅O=ܹ r7 㝥oh[ָ]2`!un􂧎'SnPt E9 A86uR:(,Cmh 墇tl 22   ;H9KcAǰ|hiP Jl)*CQC,7z(oCÆ"FpY>+|tb!_UUW}c,Hc@ TBCAiy @@x$IP& iD<:&Lw[1Xe*6[|U5ߕ=t m7# 5tS"vu- vOzjq y*OL+0Id{+o_dU5=k8Y !YX^sN_U[P`Ky\ }S1ޙ<<ŭnT -#T9?Se䩭.םc=Y*ݭttϣVUa{ 9cȴbuƻ7cڍqz/VkXj=D T2هQdzc:eVzۿ +FY Gn3 bi'kbS_3_#Ab~# Ug"::uߩD5,ڃb߯3V bkDlRolC:2U]p럊y*$kPdqmcǜ<ƣl|gzpoa8&VG;?TsjPcOCNTFWENtul=7;\;,?ZB7 bTK? 9M'2;Ogyޜ_܏]h7?rA1r룒{vc '|A|NwsTc1ј<0X{[=4|Ƚv#cv1Np Qa~ CݳAd>j[]Yn2%xHQ7{KwPMN|U&{W`g0f.&8W19N^*(J74 9T+&1R$~#u&N5h$m_ݛM:*&~!9cXhw0;d5 n*6&lvU|L$% sOg./wg06ؗH>8̃Lv+:4?`:ǃ1Jr _b֋}u058yvoCЌ.D1Zr _'*CeIq?sě|رj: U w9L<לߓL%b(D.(1HJ9׵-JDZ?Ԓ,gusmGGs=UЩ۽c+kZ=ye|O 5Qs?@n$*yڋخc70Ps%C;x}'/xo7}!OjROR㄃MgSp@xפfZ:XM]Zj3ĩ a0XjnkHjcRhO[o$X{!W kʺV/ʚe.mX,Z3FSxGݴ'i~Dy QXG? XK7$c`aAiUCiE? lFSQ״iMQ۳x3wkf1)D?EZ1[Ͳ[o |A5O4pO$w!1 "%0ÁVb;:qYΉ0;Ƒ>#†CRۏϥ!a/^k~wNBǣ>.9%7$ͅ7Eճ6:豷MѶӢߚֳ4&b9ݾ/:ef(4//97차wg3ɜ?#津%Գ-%螠/j%܃:մcgѩ-Ѵ"S-&:e>зԸ%#-ѯĢ[ſ<*gp]ٶ{O[{nNSe,mOUsՖй-Ϋ_毩Sr^0PLXV?7|-5N*ӼzzyKa?~B,ɢ5omئb jٮof+a;b}b'؍iiWTvwٮ[{ko 0:a%\ls]@YG^5C}d(*WCQ 'C} BoBC}'B}y# $dgd%-\h~޼y s H*cIO(SXR=n5_$/NJ())*O( #PE(ҲE\[CC&C:CX(0yF  &  ~ > A@I@\ĺ @)@Jr2@@݉@SEmu2 @b o M@U@5 e|20T$c endstream endobj 233 0 obj <>stream H TUy (deQ &cjj@AQyЈbk36Q]V45uHM$MhMIJ{!Ys H尪dz>@*H V}Q_XD;,zTdZ\4)4lgi]) 'D[Uc E5'ʀv2tV^2/`X3R]70wzXݛᶣ]! DCm t?g!cP/w /zzo@EuPCc1;"D!1E⑀D$!)HE"DapaF"}Fc bc&Lƒ"=Tf4b55VR PX XRTMx @qIiͧTNsqZ%TC-RFN3[>:W㯼w^WӁ΢ɝ:G}ڙalgZ'u|ZQ1cf)Q?8оپ}VOo\o{,ҭ]nR{8+;ntRFS+brܚq6y_r Lʱ~޼L ל^~;UE*߆(ᢕ>MJʴ Yc2-K50^ȕ*lle\y?m+Wj^kon poK8(}pH_~& p2G%dXD8.ͪ(8 I$_ /U% F2qV$[rdR<.pY$yx[F2RqQ %)\(-cd2w2QU%5\I?˃ LM)Ljy.yn*Q"yL b2&\H%B(Tje,hE21J87 JDbBNꍏ$J6N)jzJ㡔NIY M/[V&ę>Ə)ev. 7)F~&LVJ *4aM_3D(JFdy89 7&K&Q!9eM-36=dJqjF6> Gpf g ;زRʝδ*gyQ k. oH~k_ߗ8d6wƍѸ9wR砑)cr7pUjl^Ü1sckqX8k`ʼњyvv%5"P&2g K\0?5%3w5uf|&ZZA| B yH!!"$5#`PA-֩A\kvvfG]vݶ[w^$|+.V*Y=ܕ 9J),g _{!qle^UIӈ1^ LĊ?(0 s~rAjiPtVښZZKJf{R]/ƞЫT0<[U}I~t8dxȺ[c$1 f<'ZN1g0 RYx~Rt".Sš>͗;mݲ4NԧKaӰβ?:L-9ϳ2װy%a|s93>hS9Ѧ jɬI5_ؖocYiN[SGAκ+/PuRzӉ,WcǤ^#>+ q QE9ѪqF6cеc74C7g%)TTQ)R™瘩uƦ?4d LG*(D!޸5O[o+޴o'Uv䫂[1f/ .伐AX Kk|m엀>뗨W#.Ŷ^p"W P>￸ u ^y !Yp#GUXPPAQI.IH#*i3ӉL2m֚&LƉCL3s!R =ZNI!lL}ƀ슮JCvUkMt6E|/'GM9&e^jIDNBԵxʫ D4bV 2D&q\3gz R%g6.\UyӠ\49ɷxHHї |9 q?ZSBxŖ7ɴSˋ̬u9C SA 'ήwvm͉>љ(eWhvM!)uyr;1Ko{'ub*7t+2}_J.eEUk/+L:]E=[S xoB)Z+rR.WP5v]J'y#5ґhf]|? c/9"_ O˨9寫&n$%KU%ɡTPbMdR)tbW5zk bnoC0[~g$-?q.Ue<\^1J|g0K;.66_h.65]J 6ks[rõ-&mz`a~7 oե [nkG>?"X:)Ռ!>*$>Ǔt✺̸7>?>~W1~}߳r԰!,_j!gQvKWd|mqhڬ"Qzf*##g/=aWPcG|Fj]vu =fǗQw"y"#/ɣQ>w0Uv [Мe|-I(.Ğד'5)ҋI@$'l1L5a0L=ahu_(/pLxlцV]2XRϢ ׵*4F*&psOf;4&U=}{/q铻Ryi~: LoX,)| N>g~ IcGo.:6+{.r]?^?χ?5ǝQLf[BKς9w& ?%&G5NS3y-d07> J0 iz!ڡfRn}p܃41-:HY$A@ hƣ-JӠga;R:7A<7i3sQ1kTyh-6a<;cZk_| a#wQNS 2!sBW CܢpN Iد*29mZJk-wj!!I)%R褅IG\'\L/ICj@ HNAtD:HSA1B={5L"z8@?w K.mr1C/gCZi(R5K}[YPO4r`n'*jw fQBCzy*w'GQ{٥&!2a#.SK=5̿T/nz+|k>z ǑMN)V۰>vTD kHT0g f:+_>/ IԇfW[̝w*s bq<5|wyQW~stc穩͈:LIrp8+|g'Zʹ+ŜӜ$wDE,$8]F픐:X?@e3و%cT?`|Gt)?t viXw`9ƚ[[ТI$C{-[mX5}VF6pM)ɵwJE~%_WeV XdZ?3 E֕igk)swXiD\&IbD-nҭ-FLjfi?d9O iDNrO:wR!hRa8 I r>Ϧpbb3)@82pe*/w^Ke=&zL\/Pںߠkq9&?nMͅ7nƺl4uѝmEK[=5MI}((49X/:,9?y93#E-irPs@zrh5ƿ9#9ZM b9mWrB?:/3FZ>$1`^FR/_ T0$/3>&Nmi'Jh$xAe ۀSMXj\ѡ-ѯĢ[ƿ<67GQ'}񥜕h3ij%jF9j4Οsh6WG}p薲D ss3{U`%$8>8Uz;%n7L\u8^hDɢ5,ŵҴf }8Vfv:b)m>jw&9Njڻ#lj:~4S&w{ҽMdx>; u#pmxsvqߵ 6X,ʹa 5Bg8z5F01JܻW}DeA!-*̫hI-܃cq>w8)Wǚϰ=<`5ǚh<Y[>)k"3/tqNYle,-[mHh$Ym^&>bЄ8WW(mU[d C[±QëB䣀~Z(ǣ(b䠌O$D.xZz"7/LYwC ֚p,ڴq̟^ ,Ru endstream endobj 234 0 obj <>stream H tUy #S^{dHF&bI@ $"0(U) RJò]V*Zdb$NK Үg{=wswV@`LJxglB>9*USVҺ _۲vzg*o }ϩxGW-m|U/U6S@B7li)l T\oQ`Q]G ʁX{d.[*U΢`iw5+- y./J]/uom͝cj0"TF4b%G-mͨ@5ѳz`5a9PM밃6uCBݸ6Ihͥ Zy?Q=-E]ʩOlGO7srGr}^{5CW+^:*Ϫ,זuq n 8JTH w95vCtP>:3]>'t'dl=,?rZ&Ƥ4 LYkNOLF@[5췣VeVneZ kUg5Z?Y6G#t:R3r8vgsYs puttp?݃NGc83@ XGCi2RUtHrO1~^/WZnWޔ)9^abMiƛY4#s\2ll >ľ¾zbEX^3^uzנWR^W2_+'.j*ϨP5HQ2 ob,E] W\]\{]/^ttі;Vy&ӥ({-nu˪}H+s$\+>Sqcڇʖ֞۰;ɳյֶѭ+ܱհEI>.巾}]ҥN7(Օ<WUYq/hE׳*큻UG=_Q[3Φ9ﭴPI9{ޚ+5=o(4a͡|맄QQWe*ϲi c,36kx>662ڰs#ī7Ŏ$J,F85%Fb%N%G%IqL~q?UV 'edӒ-9+bgpVe 92XH "&eQ(s?^ş|k2ץX )2^je\2n$"yT$dLoY(.!JaR'e(5];dܨ iof/zסq^\ 7qC8x0eq*ma̞ՙV(̬ ]ا11&"rɑ0"R`ш18ʟ0gf d=jAN=ڑQ],HS ETQ}8RL+_}/?9#迻 N>\BɅbXGnW~(7YbcMjtASnd‹}*Pߕ}ꊸ쐶+Ta!ʆxmj,,?'E_[qV*:mLμ2gQS> p\a+r6!F 'n[3s֣#Xc2ppx+ *PvD5V V~.:)]v ؇7>O{ Cp2ډkAn2J'%e5t 3Yf+n=9'n蹄vqlaΖ'7f'.aIUvpNgُO^z|TDVhe[6%*'br)MVWC}Ϙ׻fN bُ#)ڡiz̏6ݱGw[>׬8f?i~o: W~x۵Fݠ!B5r~zL{5@JwE~^ wyF!&֜avib銁Bhx0&#lro8Z~?%sv>aANj5tE ^tJIBvǯl6<SYsN3rK}bJ \vpKN>qܰ .!l ^j?ov>-q~ ֖WX,H-;:`:;wD%W\J.v4Վ?P5,[ڪjښbБ%%/&ܸ$y8R>}<ם XO 0 {n R6 Hʚo.w>^КԾWLl`{ }/}X_GB;y'%LݐzC-"!,k.nژ޵?yb#XT,ϲkg I㬵OUdylIko#J}on_0%W+lDV`[Qޝ{B:7]Q.v̮+m㧖u*]J/]"d[nDm&f)+m+Ο9XYk)f ޮ}Tmf9cކ?qpKGJ ؄͚'59:\ d:t J&3JtuΥ­h{B^"pR.'yؿe';w'.9YvIjl\hƧ-57٘-ڼ5J/NӦ-"^nryk W%% L+ /N EUkffJӸ|%&rDC"< ʊ{\OC^8=shrXhwLiO2bJ;sxv8u_STY󌤭%RzݾK٦U(|+s]wRA%ˌEft5y(=sΎX(Es}'5YG#|݃oSbj~ٓ}j.ᐔ)z3Zl)FGP:Khae ,I(^(wJi7&w5YyRub7 :rZDE=H\>5 ;]5LµE^d8trA(oT舤qM*\vEC.Ȏa^8-bڃ:w"JW+ >R}>IYy_5ݯ Ke=۶F2tEIӏ/Թ r C oZBIMQ1Ukb ֯LJ Mj*?TV7`p-\oLO %^Aˌ^^Qi\=Ź ؕˌa>+7ǔnIZ^`*S=ZWK2*Rj1?[M 1%\.lNRn7;6#?PF|_0-ye[m<-wc”2czcneOƪэZԒ:wU=|zͅZ̵K(A`"SlgkRȵE@vt?6y_̞Cx-!?m?:s]x ռ%>JO98Ƒ ^H'~W-%^|OnTG}3g\*RIN1vV.F$ Ūh~߂\oI/q3Gx2a͌!<b^55ŬP;@x81kCK{.9|_9 }B"i46Dg|v#]×mûʍ/oٜ';<_E>zpؚ^+(XFr'}kNݕѕݣw9 ǡw+*l+8:i6EhտpvFت2o]vqn6LM{7_އOKKD4CB9R4uڣU)?=/qyVh 8b,af:5 bkl/ŞQ$ alHLa(zZvDiHF#[0ȨXB|2=3t}z1܃3![Ijk2*=>Z7pw"~*3|6z8uǽ" "VkwӤw,7.N%Y+F,| Ch F{ V 2O3` YHHlHwv"e#ّj }ոNjħPpEB\H9B.4MpE!a$7\B1B2gGRE0eM,2!}8XEh#@tMJdiڌvi2c:5fv% |s=~?A.C~ 91Fm~ݍg;uj+H8W'YoUM@}iu~Y=Y\қWoj?vEn?0CaG:pƎǥqZ\'{& gu+&}xMeg5eg7WpF}W_^Շ"+|eOߎaL=c#8a dmTS~!8݌#*ITj;6lo;pDGkN}ZQ,~J V8)쳌slSqNQ9u}D|_ů3Tp+cWWZ{\ ^v/|1klc*pNC c:Q=]d"1Zĸhb;n0]"]p<ӝ SC&0{G1#a=&ɱEl㌃r 𯞁6; [iu(%"XU( ANp7mx<،Щ'yE'Ռ9V1E/T?fwcU.4̾|9JZr+\l?WŘy~8,Pdd\g *_皎p<\ݪur,EVyWEՑb]!.U,m"fO[Z?y2qyeދDLU?=T#jXA4r xOI;ı>KlbQB!l!_bh XuU1< V=9~I&c]_Nm|n$'gѤР_"C~h]h ׵ssT9èV_GYjc# %䉧ԏm&ma]s[Q($K3,[$o|ə[cMM^D?U?'x|,9w8C-c67o"{ar/a!}'X3/~oX+zʜe,#X,Z\!6Ӟz~E[{'>Z{>OEߝb.m-D[)p8) hM:dDxسۍи! ƙ>ܮ&I|웧D?%Z1[D4}7Ád'_A';I{~LJxt;#Ļ - /0Ǒ>#}WC[pR +m]9,G2 Mp|.>7̾R o6j5FQ)1-ږzZ4kI;hMCES `sfGu7Rd-?.{U=CaL3uhG7e}D4>cjD#Q q|s -5PMWjb[f}y-w8lG;ϵ *Kߢt:KtβKI-νB'ι ~ >ԗtGRZRaRh?)_䔄?KMeh-e 7Z~oPwn^ ^f}Ww E%jzT, WWWH xu^@XxU$ EkTsǔiYK ?1uy4>/oi^t8DVT^X(6 yB6Z۪QO5XmRu(U&20 YX<` b9(%bģl^w*Qw#:oi>stream application/postscript Print Cynthia Engler 2020-01-20T13:25:25-08:00 2020-01-20T13:25:25-08:00 2020-01-20T13:25:25-08:00 Adobe Illustrator 24.0 (Macintosh) xmp.iid:bd9b31f3-e019-4844-ac70-2d879f84f132 xmp.did:bd9b31f3-e019-4844-ac70-2d879f84f132 uuid:5D20892493BFDB11914A8590D31508C8 proof:pdf uuid:d1c078a0-2746-42b2-b0d1-25aedff8fb1e xmp.did:1b6690ed-28a8-c141-9479-b6a9cf6be651 uuid:5D20892493BFDB11914A8590D31508C8 proof:pdf saved xmp.iid:bd9b31f3-e019-4844-ac70-2d879f84f132 2020-01-20T13:25:25-08:00 Adobe Illustrator 24.0 (Macintosh) / EmbedByReference /Users/cengler/Desktop/CS447710192_Sentaurus Lithography DS/links/CS447710192_fig1_screen.psd xmp.did:48dfe0b8-5dec-4f10-b7e0-346f800be7d5 xmp.iid:b34f7b0b-bf79-4636-a34c-94a82c676afc /Users/cengler/Desktop/CS447710192_Sentaurus Lithography DS/links/CS447710192_fig1_screen.psd xmp.did:48dfe0b8-5dec-4f10-b7e0-346f800be7d5 xmp.iid:b34f7b0b-bf79-4636-a34c-94a82c676afc Print False False 1 8.500000 8.500000 Inches Cyan Magenta Yellow Black Default Swatch Group 0 White CMYK PROCESS 0.000000 0.000000 0.000000 0.000000 Black CMYK PROCESS 0.000000 0.000000 0.000000 100.000000 CMYK Red CMYK PROCESS 0.000000 100.000000 100.000000 0.000000 CMYK Yellow CMYK PROCESS 0.000000 0.000000 100.000000 0.000000 CMYK Green CMYK PROCESS 100.000000 0.000000 100.000000 0.000000 CMYK Cyan CMYK PROCESS 100.000000 0.000000 0.000000 0.000000 CMYK Blue CMYK PROCESS 100.000000 100.000000 0.000000 0.000000 CMYK Magenta CMYK PROCESS 0.000000 100.000000 0.000000 0.000000 C=15 M=100 Y=90 K=10 CMYK PROCESS 15.000000 100.000000 90.000000 10.000000 C=0 M=90 Y=85 K=0 CMYK PROCESS 0.000000 90.000000 85.000000 0.000000 C=0 M=80 Y=95 K=0 CMYK PROCESS 0.000000 80.000000 95.000000 0.000000 C=0 M=50 Y=100 K=0 CMYK PROCESS 0.000000 50.000000 100.000000 0.000000 C=0 M=35 Y=85 K=0 CMYK PROCESS 0.000000 35.000000 85.000000 0.000000 C=5 M=0 Y=90 K=0 CMYK PROCESS 5.000000 0.000000 90.000000 0.000000 C=20 M=0 Y=100 K=0 CMYK PROCESS 20.000000 0.000000 100.000000 0.000000 C=50 M=0 Y=100 K=0 CMYK PROCESS 50.000000 0.000000 100.000000 0.000000 C=75 M=0 Y=100 K=0 CMYK PROCESS 75.000000 0.000000 100.000000 0.000000 C=85 M=10 Y=100 K=10 CMYK PROCESS 85.000000 10.000000 100.000000 10.000000 C=90 M=30 Y=95 K=30 CMYK PROCESS 90.000000 30.000000 95.000000 30.000000 C=75 M=0 Y=75 K=0 CMYK PROCESS 75.000000 0.000000 75.000000 0.000000 C=80 M=10 Y=45 K=0 CMYK PROCESS 80.000000 10.000000 45.000000 0.000000 C=70 M=15 Y=0 K=0 CMYK PROCESS 70.000000 15.000000 0.000000 0.000000 C=85 M=50 Y=0 K=0 CMYK PROCESS 85.000000 50.000000 0.000000 0.000000 C=100 M=95 Y=5 K=0 CMYK PROCESS 100.000000 95.000000 5.000000 0.000000 C=100 M=100 Y=25 K=25 CMYK PROCESS 100.000000 100.000000 25.000000 25.000000 C=75 M=100 Y=0 K=0 CMYK PROCESS 75.000000 100.000000 0.000000 0.000000 C=50 M=100 Y=0 K=0 CMYK PROCESS 50.000000 100.000000 0.000000 0.000000 C=35 M=100 Y=35 K=10 CMYK PROCESS 35.000000 100.000000 35.000000 10.000000 C=10 M=100 Y=50 K=0 CMYK PROCESS 10.000000 100.000000 50.000000 0.000000 C=0 M=95 Y=20 K=0 CMYK PROCESS 0.000000 95.000000 20.000000 0.000000 C=25 M=25 Y=40 K=0 CMYK PROCESS 25.000000 25.000000 40.000000 0.000000 C=40 M=45 Y=50 K=5 CMYK PROCESS 40.000000 45.000000 50.000000 5.000000 C=50 M=50 Y=60 K=25 CMYK PROCESS 50.000000 50.000000 60.000000 25.000000 C=55 M=60 Y=65 K=40 CMYK PROCESS 55.000000 60.000000 65.000000 40.000000 C=25 M=40 Y=65 K=0 CMYK PROCESS 25.000000 40.000000 65.000000 0.000000 C=30 M=50 Y=75 K=10 CMYK PROCESS 30.000000 50.000000 75.000000 10.000000 C=35 M=60 Y=80 K=25 CMYK PROCESS 35.000000 60.000000 80.000000 25.000000 C=40 M=65 Y=90 K=35 CMYK PROCESS 40.000000 65.000000 90.000000 35.000000 C=40 M=70 Y=100 K=50 CMYK PROCESS 40.000000 70.000000 100.000000 50.000000 C=50 M=70 Y=80 K=70 CMYK PROCESS 50.000000 70.000000 80.000000 70.000000 Grays 1 C=0 M=0 Y=0 K=100 CMYK PROCESS 0.000000 0.000000 0.000000 100.000000 C=0 M=0 Y=0 K=90 CMYK PROCESS 0.000000 0.000000 0.000000 89.999400 C=0 M=0 Y=0 K=80 CMYK PROCESS 0.000000 0.000000 0.000000 79.998800 C=0 M=0 Y=0 K=70 CMYK PROCESS 0.000000 0.000000 0.000000 69.999700 C=0 M=0 Y=0 K=60 CMYK PROCESS 0.000000 0.000000 0.000000 59.999100 C=0 M=0 Y=0 K=50 CMYK PROCESS 0.000000 0.000000 0.000000 50.000000 C=0 M=0 Y=0 K=40 CMYK PROCESS 0.000000 0.000000 0.000000 39.999400 C=0 M=0 Y=0 K=30 CMYK PROCESS 0.000000 0.000000 0.000000 29.998800 C=0 M=0 Y=0 K=20 CMYK PROCESS 0.000000 0.000000 0.000000 19.999700 C=0 M=0 Y=0 K=10 CMYK PROCESS 0.000000 0.000000 0.000000 9.999100 C=0 M=0 Y=0 K=5 CMYK PROCESS 0.000000 0.000000 0.000000 4.998800 Brights 1 C=0 M=100 Y=100 K=0 CMYK PROCESS 0.000000 100.000000 100.000000 0.000000 C=0 M=75 Y=100 K=0 CMYK PROCESS 0.000000 75.000000 100.000000 0.000000 C=0 M=10 Y=95 K=0 CMYK PROCESS 0.000000 10.000000 95.000000 0.000000 C=85 M=10 Y=100 K=0 CMYK PROCESS 85.000000 10.000000 100.000000 0.000000 C=100 M=90 Y=0 K=0 CMYK PROCESS 100.000000 90.000000 0.000000 0.000000 C=60 M=90 Y=0 K=0 CMYK PROCESS 60.000000 90.000000 0.003100 0.003100 Adobe PDF library 10.01 endstream endobj 236 0 obj <>/ExtGState<>>>/Subtype/Form>>stream Hw6PH.V0C<.}wPz1W!PAPU. "u- r MM Ma dWWW @7 endstream endobj 237 0 obj <>stream 2A7903C314773849883ACB690D6D62EC adobe:docid:photoshop:6a367c4a-8769-1178-b8fc-f59265be1fff xmp.did:1c67c092-f55d-4a7a-bf31-de1244cb7e87 xmp.did:61d8fa4a-807b-814b-9a58-4090fde3c5e2 xmp.did:707dbb61-79e1-5343-8798-73c77e54ad6f endstream endobj 238 0 obj <>stream Adobed#"/A1/6>8@X@8>DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDD/#//DD8DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDD/#//DD8DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDhx"  1i! "#$%&'()*123456789:ABCDEFGHIJQRSTUVWXYZabcdefghijqrstuvwxyz!1 "#$%&'()*23456789:ABCDEFGHIJQRSTUVWXYZabcdefghijqrstuvwxyz ?@ Vhd 0 ` т2DehZ2GCIhh:KG)@!4 ^K4!lYmXu]#@# F"TFNRg*8ID/r,8#(!!A#у"`"  `$Hi%RFFQd[6Kg*9NȔW*r)1(a(0$Jr%!HGhi- G CIhhtz= Z=GCIhhtz= Z=CCI:-'ф44#4hz=4t4GCIhhtZOCDi+ E!4@-t4#4:KC@"Ih!"`A@?l-$@1` FF# `H# 220` Z3CI Gz$46,_b*lS(HjHTBU)3$F%.~ p_8)ÂJ% %D`=g3" `ȁ$4(UPԪ4JRhN@Dl- ʜeNUJؔBT)(a8B,Q9G:=- %4hi- G CGi- G E4:KC@!z+ z9=4A %ZZ"XZNR Ff CIhh:KEZ ZZ  D@# DFF  d3"$̌(`A(IH@= CIб"#bWb- 9c(Mqĸ6Jd!,ASqı()~&dWC8J$dfQ#`D @FF*5FQT)5BFv6ST1TD"Qp8Uf+"WbXShz#- @#h:=4`@L @$@Ĉ' 8F`"#Ii%JD p20!- $4a贖@#Z-$@"ID# DF` d 03222`H3# 'FEG!D 6&V(ٔrc )d&KgQ4Tʔy"EpG)((,~.|WTDVDbPPDbqP0aDCGhhc@"IhB}S*4R4j:)4*:F[jjJWDSiYpW[' @ @0FT0@FF d`QTiH"2A p$PfD`i"D(TDD#" d @0  0F`fF@ LP"2P҆P3#f@YH $@"U"+ɝY9y1ϱ}MDT+I2pIBD)9 C8#qx:"rƬ,)P@J!'dȆ! t4z#"HU/r) 5:#BVT*dy, @lR؀q"je3 NUR*lq1q:E غp4VX-' CI  `@ @S*`$dd @F U@ICf "HD R*T $I"?@@Z[0f@`  3D0HQ(HID"@{#D'ئUK`(`0Dd27'5+9"H1l*'Q2 Tʔ) RP8B, VUDrR%2|J*'28%جqb2H0$@!b(̤*NS&Uګ"5y HD%ơUD9UcS)n5n*%[3~5ՃuPF+"jJJBTI2l.$2]*Wcr--`[0d6H` UE225&a(e 20`D$@!JJ*F%HH@ѥL\h:'[`  dfh0 0T p{-Ҥ9P)@OgG*9L&h$j$%JPF #SP\\.N*ǒ)dQJd@"" PJ I Gq0J#' D1f"x]Be(e0`ʀs3) :IQTi% (xE)UQ]qB,Jz)cVJ')ĊJUF5\%Գ\1|jɒTS2NTq+6hJ{#H#chVj7$2*K<\休Dj׎kŎkfEA&gP)tq +#=)@L8FfG0DdTRA` D3$@JTj5*T)T4i%Q@20EL$)%Q2  @2d`IN` Dp)l"r*RF"ppє̒qUb+%JT"P{Gg eh-0uYW'UM{u-ED&@dRM4DDq8OK"QN!b)l\&S#RL*h mSWPT*%EQ" fSR7[apSJG dT\Q}MJNm9\U#.!\_NGUe*8d5ٌs'=&pR 4zphR %B mL%@#lY W.#a,T勶,$8ˑJ qWf\]zMJ2wr<̺{¸tJNx՘ոr]*Q\ʙRf3D#F#0d`#20 D  0  :5*TP#2@F H`R2d́LD4HR CdT@PTҕZPdD"QPYUb*+"Hġ̀@lFʀ(䘻23b8p%ɴO->%"5Gģ]8q!tJfILTWlm\-IRSqf VDQ(Q(i UQdL̠M'AĔ5X+زUUQyEuK*65- >#U8.D)ɓdNF5f5*SYDFPу = CIhGCI Z4@ fd@ @ @0@ 0i !-(R%!FF2$ U$4I"dlGmҕ\H{DF@@4dG@# ($)D%hh`р$=4@ Gz @- 0DH"0de&26DL6[-E lm a=*#)+6q[8q q#rC=qP J,2NYY(34H\ѹEƧ1 \ey#Do$2y"9h̨[h\\m 2:+!rFRp 6jePWĉR#S8k#q)> q%5n5q,cVF,lYV x2YD%'Dg-a8i 춎&lmL`#LHg(*u L^Kjᜩ+KrS*+U-BҔs%7" %d7FWr]q2g*^5n5͎K&8R5(T F%H d`@0`D 2  0 `$I"TDHY!`02 Á)D8p0!#pp$@ 0 2" 2  NSFUPTk9\#Q5Bӵ EL+Q%3r)G"W5>/ExtGState<>/Font<>/ProcSet[/PDF/Text/ImageC]/XObject<>>>/Subtype/Form>>stream HWn9}#yEJH&B I _iR.75+iGXJc2lz؜=|ojSFmr*WڼvA_:Ѷl8#ӷ=vޮ||A,ݚMg'vUKBG&4Ub]HY:mv. y1sxёL+̊OhjAS3BCB[`qtO{a֥=pM!ot=oS}ã/7"{ mP #lŭ!EkE.R@hvװ-VQ1qP&OFf aOMGBbêť^;̈́&5A@ CA,J.Aq|nZAgv҆TC`tm8.p-*6P[0&m8(9n"?ٸ ~mN~ y{̰I$˂L\{:Jץ/uܕS1wZjLᚳB<)Ov #h~5GTcGnBSqsvj|P''Wjuzz~\ aQ`vDm_M+|'٨heD(}lo.PΎTY=y|=ǒ1\n˗Xpl endstream endobj 240 0 obj <>/ExtGState<>>>/Subtype/Form>>stream HD; 0 D{b.`G_"u -6 Uz`15&`?-Ϡ g-i\Ė/15r헋Bʊ껰Nm" endstream endobj 241 0 obj <>/XObject<>>>/Subtype/Form>>stream H*2PIV XHUE  %>n .\\< ! endstream endobj 242 0 obj <>stream Adobed!!##!,##!.333.!>BBBB>DDDDDDDDDDDDDDD  &.###&3')))'3>344443>;DDDDD;DDDDDDDDDDDDDDDDDDDDD  &.###&3')))'3>344443>;DDDDD;DDDDDDDDDDDDDDDDDDDDD1"   w!14AQsST"a2RqcCbr #$%&'()*356789:BDEFGHIJUVWXYZdefghijtuvwxyz+i1Q!Aa "#$%&'()*23456789:BCDEFGHIJqRSTUVWXYZbcdefghijrstuvwxyz ?@AcWBB*I-B ]cKȦ\@d^sl@ը*qSE j&o2fp@Ƒ빶=9ZZڟZن3<]k]yl=c_J dk]VܛQ2Yphoy7ڲnYcD%<3o2[x{%kC#`sIe2=6:pe"{Iؒ0_>8*KZ3ApYbmo45kF3Ou9 {\װP[B.{DiڸP4O&GɬMg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LQn%q>Mg7rk?4!&W~iCx'&LNk(YYd+ 4TMe&W3o$vHctFƱY]F i`a0Iĕ#K m}Bk?4!Ud5~hIsot7x&L|:;^ß[X1.uֶYM#b%Iĕqitl Tb:&LqgD#yi{ތJlgLhѨx,V2*FrEiq56k5/A GSNUudTG]@ WY4pLr ¤eՕNx"ooPr盏 "XQG zOQIc=E25>,(&B;@$Vhޓ1u5ժm79mL Ln%sIir^K5Kp͡cX$Hp3.$(Ǯ0rxΐt =q-rP- }m[S ][-;%oZ4 7YƸXl[{OEU;ނrTpX u/ŠMUn7:FRz@{"ZhcIi Zz뮵,p`Cj*29V ν{(ᕡɏMPi8_]u_xCxb޹Hr o }e >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >Ra1 >R宪%1?b @֛\Z`%T UT}~yNw6Ӄk`qk\ZEa8\VaYWA+PD{KWƤ:S]ʑ%mjIL#&&-vGh *[1@~z Y&W:h \tœ6ebnnGX`NXF< `i˝ xZqRjslպ"cBF*֕탊IFs pA_Nc8/:ti748Ҕʽ=M54eDSGÌl4 Ң}91.ΡkE1*eWx*>!co2@]x:g{ QN y4/t k]fLL/ m@{Z*4.Ai7:?JM2|M0 $c[CFt^ -h]rx:۱=Z젙n|tnR$%4VƷ _{JVKc;a^dh7y,|lfnas;G&?JpqQ ҏ_HG&?JpqQ ҏ_HG&?JpqQ ҏ_HG&?JpqQ ҏ_HG&?J 4*޾'9An/z`e6\q]I.>(FT::1Zv׎)8SeM3闑8Z6ޮ%r_fL8CR\Mac_ih3F FEQ EN"Yξ,)ORօԣr4OuԈƹx&i ? @UFT^^< ^ k].FKHu.Z^tcH#c^ڗ K抖''ؿKy>h0کmRٛW;㠚Ѹ />/m0?76| `_SG1]u3"q'1c@}g#ys{.a 1DS%}; 4VSZ1sDn-7 Pxq!NrSXj)JnWL{k4H朠WSޱ-!$ipp wf'8ᕣ %- v;o n3}FIӔ:v@C%5^$VmJ++V{kosb'%Ud$ވXiUTڣjdpT>(_18[ynkI$WJ(Rmphlnh@|J}+\Bdd2EH;o4k*q[ dqyQ]T04m:LZs%ރ ֝t3?ٯ]BEս/H95zhحRag}|1 yO8tcY"JP_>b]:]Q:V\V:DƱ*qXx7F6 Pv}}UTm¢O%Pxց@@dֹoKE)TE upհu )TDm+bq3Ke\g`֯5cXZ֜uT΂-V5QzHZ,s/ F2)Lxן?ٯ]`/6;;2Rέ2z'kh{E[`:2+@1Tx%3[/x/vp1-cIhWD{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{iC^D{ke+Pˠ3t/ C-r/3xL ζ]X"weԵeH*#E@/AZwrҸAb2h^7ts.aXEő19H\`hm)@];-e5X2N*^G68вNLeBƵ"bщ}$ƒ2H]w])}(ƀޓ4_Q[<279޸bq'q*}K'DME}UDFou j@WNI+5S4pnZ ( RF(ތeakqTRv 8O Y$s\K [RDv207F3ξ`YM}ޖhErS1.d>as)ZqbXv:e ѐuFC t$\ü;w8-dQYۣk ki1EkI9$\ü;w8&EGlp2kS1m覀4z.aXE;"# |Yy+U$JX3ЗH$\ü;w8&EGt#8z1x,V!ZA=ɩy=E;HycdQ$zB0Ѐz4dU1BCxE;HycdQ${𻤋w8'tsȣHq&%wI0,pN" GpLK.aXE;"#Ę$\ü;w8&EG1/ HycwI0,pL;wb^ts.aXw $ļ." $\ü2(=Ix]E;HycdQ${𻤋w8'tsȣHq&%wI0,pN" GpLK.aXE;"#Ę$\ü;w8&EG1/ HycwI0,pL;wb^ts.aXw $ļ." $\ü2(=Ix]E;HycdQ${𻤋w8'tsȣHq&%wI0,pN" GpLK.aXE;"#Ę$\ü;w8&EG1/ HycwI0,pL;wb^ts.aXw $ļ." $\ü2(=Ix]E;HycdQ${𻤋w8'tsȣHq&%wI0,pN" GpLK.aXE;"#Ę$\ü;w8&EG1/ HycwI0,pL;wb^ts.aXw $ļ." $\ü2(=Ix]E;HycdQ${ZkSR~GQM@AWwiɐˠ3t)a$е9\k\^[&nE[iDu;Ws;y70ˠ3t*)ŲfTUՑQDPD@DDD@DDs.sZ_8r (X')Fx(-eXo)5ع֙%tV6FH#/pNL0$&UYj1 6L}AD@DD:D\*e>+pAwUyR]3/$ #߮x\*uk"7#c#k#Rl6Ozؘ@06P3v1& MeT'3B" ""JUyM\/EJ'O|u/ 0qh(ԏoPBR\3 lmQPcrCMԯ&m'vu9D@DDD@DDmrk>yˠ3t*)ŲfTUՑQDPD@DDD@DD޸T(l$Q@|?P[6@ydlh}|:1ι\P8A$FL^ (Mih?/Uq{5q7Zek >UmC^ܣ쮜'5M0tƉKE`Zܵ/Jr9stJd 퍲Z[{}\04cLsRDY1+Id1)fZ_J" "(0mkP@=ňs1Ѽ6*EǻYu$~[8/rS+9n,AeK5-2JIe ēL̺¬ٯ^sv1)M% yhkqObϑZoB@ \$䔂IQ$w|2X>z" "/ea%ujN9@N{#f\ҘPu2O}VxwPPSBf/"L 488 o.F56rHhA{ҫXq7ܦg/5 *WbGq85C0b%(⊭d""" """ />לn󗠼^mΰˠ3*)ŲP跡'36xճ6܂;A:;3O=泾❶'XA:;3Oש'vԞ)+"3Oͣy˱f}x{JYZ]{^qmYjXˠ3t*AŲfTЫ"9q4lVjxH[/qoIѯlUĒ/\j rw8e {R[g|( dz*^Um+XT5-S@wd7>cɈ|un7\NֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈTJhNֈYJbD5R+^YSW_jk^R”ɊPJWSdMkO}&ً*| \|vwyi!*wˠ3t*hS7dЩWVED4/6]V\=׍+J"M" P6v!k-1.LՅӲ2\A4Ix8Ԡ;DM|V&CED5Dƺ/oKU֗c4e4@s1nKH$Ҡ}be؍iC/*1Chd| qU_SJ 89$Pj*S YG^T7(лh" """ """ """ ""sBAU*UDRUJT@J(UQ*UDRUJT@J(UQ*UDRUJT@J(UQ*UDRUJT@J(UQ*UDRUJT@J(UQjsfxWbLuq&$,Ys:-Uy8dzfy8kg֋m 16 ^ҍSeԵnq|/F,:qy8kg`i,m^ 4N:c^g#c/s{^ל}nj<{umyݶ9ˠ3t*hS7dЩWVEDN[DN:Pxt!wI)zjڃQ9cE<<*du'ǂwƾ.076wTKkB@hU.s`8i %< x hR+ZUzCa1HƃW A:e}URo " PeJD'h|?2n~bvIc*",L""""" e9#(U̞S, rODEJDDD@^c1H6ocϘh*r̛e2d ?ˉ6nv$^l XwCg)&cqF2ԅ>]/C-Kgq͛RN}/VYh0;qh&EH9pk@tYl{c$I\zo]TR$yނBTyݶ9vcδ=WU$8 ?ˠ3t*hS7dЩWVEDtm9g|4"y=uuؖ9 NmoHOTV2!eMu{k_x@qB=*e'@{NJORW%H.>r/zZѵ0rSkq@z 6G OǜX|qC${#eK[ŧ@wyMhsM^ ai =k $/tPxO} =4Qd=Z"&\kWHSx*\=)ɭ]#M‪)rkWHSx&tu7ɭ]#M✚=( &tu7rkWHSx*\=)ɭ]#M‪|mL Jմ_|=*3<-6N\bc6ֆ4 :2iƋPkC_fѵއr?Vi0HCKh+dǍ}Ghl2 op Ri/2a<#8 I2|KZZJPWrWFEC',^EiLU s% XyԈb>@vKZG95{PE.Mjo֮@U5{SZGTR֮NMjoQKZG95{PE.Mjo֮@U5{SZGM{WSd絭!T@rDT肪" ֝VMُNI,eDEɄDT_Mc@h$LBVQq}6;ZZe@c["G^.EX; a疠K]QLe6 c  qdP]7<-r{Yޖybv_r8^E]e9#(U̞S, rODEJbguq'.!}->a<Յ P`*ҷvXN7X ( * [l{|FH%PKtGa,oצ恵arE$F-82D@^c1H6ocϘh*r̛e2d ?ˉ6nv$^l 9b2 {\r'?X)QIBF5􍴾hu;Ѭ%1ul汽0o@@EqҸYAj24鮗Kl][8'%1ulX{^Ydsl][8'%1ulHZ]HqBu)Zmr28Fư .8 ?ˠ3t*hS7dЩWVEDuso9\NCZ ( 7`4ω 8ZKj*) DQiyGߑ$CR}m(2(Aqi]Dw?HA˰ u"4ҹu] =җwqoOE__8\oR {n *MoGYAxYQ{Z Мcͳ ..@۔z˖8b, GE*8u幍ÔPHSG4cҎX\sI4u$gèľA#zq\Jc60~ -daZhmMI{Kv48І7 F6۞+b bA@vp A}`F3;P_Xk(3;P_Xk(3;P_Xk(3;P_Xk(3)FkUe0#Y@x}Yb ji_ETLȬеy7qJXAJ{ZE!|} ܔԨ<`50Z؇Kb|2_FhiБM!z.VgqK4 ʳ߸έI/&#"ώ[f{$}@u@3F=k҆8ߺ¤+p.e8<}\ꑈ]Zg5ڂa/S5vgj 5evgj 5evgj 5evgj 5evgj 5evgj 5e~^ t"0b5PrDT肪" ֝VMُNI,eDEɄDTR<qEn׬%l~{e{CØ Aof-\1YP& " #jKgV^Gl}CQneespn^E= 2eЀ=Ukfs'FQ[3=_|Y8䟬 <5('׹A&DD{| E>bmHʯ2mDBD@|ɐ..$ٻؓ ]y\Iw(.#ٷE8>\Go " />ל}n󗠼^qm@ˠ3t*hS7dЩWVEDutXccŔtmqcĸkCTҐ3yˈfY]\/EImEET)ֵ5$Z4AA(mbl s keqDqM {REh{ $4ҵ-`--p|kY pYs\m}wFR+L`Yl~ohrTX'2yˠ3t*hS7dЩWVEDumTVvo9N%Llo1_PW"mLtRdûE-1Py,FY[%X5|/} "H2熐Aki4Ai~6Ef3LI0Z17x2VڻRa$uRY}}Po6D)K >=yCחJ}F֗ĺbdqNQ:&8Қs㓽%ţ48:auH%: 7Θo0'Z`N L ֘xXo\C}Z) R6FKij;y6jtQF;-|R.p\%kJ5&\wD@D&cwX,,|6ym pc@[_ %Z0`L4-hE vumv_LiP\/WE=Ukfs'FQ[3=_|Y8䟬 @xѾ2S]bK Zhtd*Ssebc*ֵuK+eppn0D@Zt,a-2`592ܹ۬hq9ڒ(K|ԲFzVij۩لM,G+\ Y`֫Ks@hĀ;A|/{| ES^d( ]y\Iw+&@fxP>\Go p|fxD@^}8/Aywˠ3t*hS7dЩWVEDumblr1;MncmkymJgfL1Pmi,hB@Z_8Kz^ڊ0SS&LpW-6Б5 , (iBq4ַ5%*q$w%J3(!Z1*s)\5KZrܻ3";oo0w8޶x.5 5h$P :+g5 - 능ڼ+: 4M[@0RaSP 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P 1Ԙc0>P \.o/Zp9o MAUDDD@kN~bvIc+&'h|?2""*SL@7q{m2 xj㢚׀ s,O!?)2h\*i@H5.l罞[P#]h Ƌz%)$| eڱbm ^c1H6o$TW6"!B" >d^l I..$ٻ.#ٷDD@k>y^}8 ?ˠ3t*hS7dЩWVEDul[;7f6FFy-k{A}Lyoc,rf8@ւM*E Nҹkhh"BK5IE7(\Up9ItFeE-8k]a\!s(}5t){+-F5%=hnF鯅n-q ҘR;gMC6KN:TV7&'D`{̅&Rm F EWU֑M EhA4Չte%%ehG}*Y,Vi0ys MZ4Tv]Kz¦_bY̘ ]p8Jz. ޵ŘPdA1\X6G0ոrSJ:uaΘaΘ0'Z:uaΘaΘ0'Z:uaΘaΘ0'Z:uaΘaΘ0'Z:uaΘaΘ0'Z:uaΘaΘ0'Z:uaΘaΘ0'Z:uaΘaΘ0'Z~2R`ZU& "")D XEdqWc#CCPFB׳Xɻ1>%0""sZZ#/@DD#(U̞QGld}dK~"*PW&_(" "">bm ^c1H6o$TW6"!B" >d^l I..$ٻ.#ٷDD@k>y^}8 ?ˠ3t*hS7dЩWVEDulgfY; !cT /H0.!+m/4FiP^-c|7` "dg|1P>zcI5Fc񨛑f 9CFKAЗEr=hqJ*\EqOT*ak%v  fh=K!km^րkϋJaz@mHMkGGo@_ 5 ED^[TЌUHe/ 51ct aa XPXaj+a0.Xaj+a0.Xaj+a0.Xaj+a0.Xaj+a0NXaj+m.+V6Xr)ap.a@}aa X@}aa X@}aa X@}aa X@}aa X@}aa X@}aa X@}aa X@r^2R,QPrDT肪" :/W7 \W4=9{2A& N*jO"[[&Z _~ X)^G~bvIc*HJo/})^G"EO=>$,QyrqE{jQ~S(m9O=I ()^GQyڂ$_/#NS(mAB;ӏ^Gj^0QyKqWLe9,d.I})^G"EO=>$,QyrqE{jQ~S(m9O=I ()^GQyڂ$_/#NS(mAB/}WNx~Džxks)-$IK^d(2ןě7{»d ?ˉ6n{6ˈmQDDmrk>yˠ3t*hS7dЩWVEDut rg8&uUD0 \Cscg_< JiI{7ǰ)JV*1.dt5ht qd{gM!a4vS'H|Ғ9@J҄/%kefp"˗glwqk:eƹ1* ;ËC\ P'8_vKY;_$LsDb1Ziʅ9mμ|bԴkhq py E{paέu 2 i !8Іͽ|\M}z.Չ5~0\/H57hh'&FWV-4 -nf*e/rU䢱"Zqzl3u7Q]fMH}0ŕ}Jx>Ǿ4F< ᛨXL a X@}avtw/{kEI:\ o_1"ƌק)/i]= FI{9ԥKqţ*Ey  ݰ-t{Dw7-4>ˮbW>i^$u+_T 5Z/ lomkBgKiѻ 8ZҤ6F?\(BH-v" >ɮ4;K4%ƃ=YV8""zOW(Vg2zLp%?XA(L;s%6Ƃ KP۝Ŷ4e-JxWl8R۰A Pg8u$m7„d@i'14{KOWڗCjkث)VV!t;w_f !&ǡ"yb4sO) /cϘhױR [ 9UMP2ןě7{»d ?ˉ6n{6ˈmQDDmrk>yˠ3t*hS7dЩWVEDF,M7e&c]H6 r(Sj y%f`amjYq𮰸-m?FFx=kD.93;dwkJRުMs]#pGx?<0ЌM8}VPu.LIHf0րMCV4W" /h*4\9sKKN*+" """ """ ~E5GS@rDT肪" ֝VMُNI,eDEɅݲ\U7]h#p5rb+k'-> c6Ԁ_Dt*SvSgFSAY]٬.c|AMKDD@Fge'D湸‹[]m9Κ:=ZC\[=|K s0F`@iYd`>&, n FVX1ˋ"2UZٜzOW)N'",[f>gM/5JyZ.k)x/\4PҺV˹w.+glDA=feC@. &" :v4b4 u]ZK!4{IŠ,p=׶ьxvA] [Yg1"7|qjK;-6,m ikE^c1H6ocϘh*r̛e2d ?ˉ6nv$^l ˈmQN" ϵvۼ/>ל}nˠ3t*hS7dЩWVEDF,M7&] DDD@DDD@DDD@DDD@DDD@|")9o MAUDDD@kN~bvIc+&'h|?2"B#< C XcQ*SwQP~ ek^" H E׷L !ޓvet+,qsn[ ]uz 9Gld}=Ukfs''\GؕYˋ[<qV4읹Xj4Su59#\6ŪY}vOx""":$ц܇1 sL5KE*wF}[ShQ^c1H6ocϘh*r̛e2d ?ˉ6nv$^l ˈmQN" ϵvۼ/>ל}nˠ3t*hS7dЩWVEDF,M7&] DDD@DDD@DDD@DDD@DDD@|")9o MAUDDD@kN~bvIc+&'h|?2""*SйI2K7p#[ZoDd/qUWpܗ:]y&4E԰5Ј>:{E{ ""nnbc J>$«TInwJbLn,#$bh*" 9Gld}=Ukfs''\RawF$Lc( 5.ҳ.M٭>7 v21m%Z@tD@m6=KCm&iڢgh*qZ˲+(2@-$:v;#쇶$Ez k*NJIJ;A|/{| ES^d( ]y\Iw+&@fxP>\Go p|fxD@^}8/Aywˠ3t*hS7dЩWVEDF,M7&] DDD@DDD@DDD@DDD@DDD@|")9o MAUDDD@kN~bvIc+&'h|?2""*PBu ͫCA 9 4-r{%[nH┰$BՊ&^8TSߠ7` Zveh;`t槾kE)dY٭-1,#I+6f $;%h##tSZs$8Omuq8Jj4z@=Ukfs'FQ[3=_|Y8䟬 # =]L$X+eEWp-ΰ]41E֚g0H^qb7_#Pr@dwR.tO&Fa[|H7k|\bgzDm{A]eе[_iW_cZS@]TD@R [xs)-&DD(DD̙M]2ןě7{€A=}TS{6""yݶ9z ϵvۼˠ3t*hS7dЩWVEDF,M7&] DDD@DDD@DDD@DDD@DDD@|")9o MAUDDD@kN~bvIc+&'h|?2""*P" k\WJ_ PDܲi]+|b+DD#(U̞QGld}dK~"*PpݪZ-^bȺ" "">bm ^c1H6o$TW6"!B" >d^l I..$ٻ.#ٷDD@k>y^}8 ?ˠ3t*hS7dЩWVEDF,M7&] DDD@DDD@DDD@DDD@DDD@|")9o MAUDDIm݃mhiՆ{CZXE4 tUJ1"*C\A-ԑb@`\}N`s-xit4 +rRp[k#Y y|wq  .gOgd]\m4АM uW%]^b^N m"NrRpN.1/U'= K%]^b^N m" ;{˫KI;ĽTDw5/sWw9uyz8-$yj^.1/U'rRp[iIñ˪ pRpT,xZ8',Љ#;HS.E Z C|2c$qz˜]]^b^N %*Y;{˫KI;ĽTDw5/sWw9uyz8-$yj^.1/U'rRp[iIԽ]^b^N % {ĽT˫KImA'{|R9uyz8/F[e0I$1<$^cŜH& _9kF3Jzxul6-1y&Lu2TDD̙M]2ןě7{€A=}TS{6""yݶ9z ϵvۼˠ3t*hS7dЩWVEDF,M7&] DDD@DDD@DDD@DDD@DDD@|")9o MAUDDD@DDD@DDD@DDD@DDD@&@fxWbLuq&|fxq;* ""^qm^yݶ9ˠ3t*hS7dЩWVEDF,M7&] DDD@DDD@DDD@DDD@DDD@|")9o ((Ȣ " ,((Ȣ " ,((Ȣ " ,((Ȣ " ,((Ȣ " ,T:c!&@?ˉ6n}B'q&|fxq;* ""^qm^yݶ9ˠ3t*hS7dЩWVEDF,M7&] DDD@DDD@DDD@DDD@DDD@|")>^FkZ*IȞ d 4$.-atXN_7-qG^s1{;4SWJz(QF߽H]zJļ܀،E!̽54h6à 7cPh*V8$$iB;#k['ǓsWƻoͲI (\/G|I@p$tm&⯮=$uM⺲J\pk\YR. Mhە$ᑾ8_oƀm*+5S-m{A"& +As*/q )&U-ZDc.Œ9|_8 ]+Z@Bs,wH (XްTף|^Mjo֮:]֮:NMjoھ |^Mjo֮:]֮:NMjoھ |^Mjo֮:]֮:NMjoھ |^Mjo֮:]֮:NMjoھ |^Mjo֮:]֮:NMjoھ |^Mjo֮:]֮:NMjoھ |^Mjo6{PSx_2<gH5'H]_ WDٯEXrښDiJk "Bj `R K"`eg%u9r4=-2>Db7cˑy $9A.l ك).#Ѐcv/Uyq%cp,N˹C9yYFsf͢3.$ٻś6dx3fxWhA=}TS{6""yݶ9z ϵvۼˠ3t*hS7dи){AJ5udTE@wN .$g9/Z%\N˭Kֹ9#9z ;7K.$o9/Z%\9/ܑk3r|rrFsNHr^˭Kֹ9#9z ;7K.$g9/Z%\9/ܑk3r|rrFsNHr^˭Kֹ9#9z ;7K.$g9/Z%\9/ܑk3r|rrFsNHr^˭Kֹ9#9z ;7K.$g9/Z%\9/ܑk3r|rrFsNHr^˭Kֹ9#9z ;7K.$g9/Z%\9/ܑk3r|rrFsNHr^$\.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^.$g9/Z%\"FsNHr^1+o\—$g9/Z%\k,W61uW$g9/Z%\1/\Iw*|kAIH"a.#ٷEZhzDDmrk>y endstream endobj 1 0 obj <>/PageWidthList<>>>>>/Resources<>/ExtGState<>/Font<>/ProcSet[/PDF/Text/ImageC]/Properties<>/XObject<>>>/Rotate 0/StructParents 1/TrimBox[0.0 0.0 594.0 792.0]/Type/Page>> endobj 2 0 obj <>stream HWrkDVٖqb:+nA Y& $gE*TsN^-._XYǾgv!}~|smL2^0&jq#~je3 ܄oEn2ױ쀭ʅᚫo?ҪMZQia^߼bn4F9CVx*޼E~h:5{+܇}:9#^-NwruDNYI"7ߺnbN½ʺ>-snj簿6PsK͍cԚ<HgL e^5c5KЊi'JbAiM'<#m"c oedEƺn˴8{Pm_U[j;?VQ Xk9`{otsNb|csaWVM? Xl‘u۲T/:lҮ-AvHZht\RGʋ!XYtgC랁6L;!q7!ݡb+1٩o!p|ZT9bdYR&\I+uƃU#wbQbX!=|7a±'1V]O['J*+|UR2L*0.z {Tiȏ& *12DUY tm;Æ{1`K}p0'ξ󳢰<*3 >nkg o9UatR}0 D*, `|׋S^]`1Dك& Q RQgC`1+_ -ƶ tIL^v޶nПl=0VS5|* x䪇bQh\FXRիOxNtB`Mry 8|%(e{ֲV;QU%%%/j(rދ< Wӑсb$b i@s$zQtA1Kz 4*jL=uPˡmpLpN^}'WڋPpR^o1NP% ~8(R&촂fW;DP߹ 9D0x'rx<ÀGL=ҎM}*}TJBqm=hSJh9aQ=)_ c7uE-rDS \M^[K" o7H zj5`/Qپ.&/owbpS7c`i7Gӧd0*X"H<*!E(n^"cuuk^)->p]нeMkb}{%ԅRJJ>!_ӭyWU"EqHՏV$lCfm̵!#`.'t\ k7Vэg١{q8X!r'~%x(Ki|qLV..ߗ6CAyF`ł0(V`pC/xt,яZ'['z] Y`#s|q+6>nե!֣ ^MBt!wGcZ0mr\\el7l7=0)/>un*Tl:YlYœ/||Z gm8,} (۴SdRv>]Ib̬HL~ # {T8R _&7aW bfY@l\6N7?NJt y~!kdGk5qHy| "{Z5o3҂ojۭq[r@V"yT #Fq' ưit# 6y@ٓH:^ >/8E o'mBv vYhyJ.ZOGqv#O#J:ƃڽc`'j報+u]Zm]dph'Qy^=v/?<_ѸU_=op<>stream application/postscript Print Cynthia Engler 2020-01-20T13:27:43-08:00 2020-01-20T13:27:43-08:00 2020-01-20T13:27:43-08:00 Adobe Illustrator 24.0 (Macintosh) xmp.iid:954cba83-f0e4-4d2d-af6f-a4cce292e2e1 xmp.did:954cba83-f0e4-4d2d-af6f-a4cce292e2e1 uuid:5D20892493BFDB11914A8590D31508C8 proof:pdf xmp.iid:47575cfc-1341-4625-8cea-023719965122 xmp.did:47575cfc-1341-4625-8cea-023719965122 uuid:5D20892493BFDB11914A8590D31508C8 proof:pdf saved xmp.iid:bd9b31f3-e019-4844-ac70-2d879f84f132 2020-01-20T13:25:25-08:00 Adobe Illustrator 24.0 (Macintosh) / saved xmp.iid:954cba83-f0e4-4d2d-af6f-a4cce292e2e1 2020-01-20T13:27:43-08:00 Adobe Illustrator 24.0 (Macintosh) / converted from application/postscript to application/vnd.adobe.illustrator EmbedByReference /Users/cengler/Desktop/CS447710192_Sentaurus Lithography DS/links/CS447710192_fig3_screen.psd adobe:docid:photoshop:268df10a-0d94-1440-a79e-6edda67c884c xmp.iid:714da100-fcee-44c4-8b57-ae013e00e590 /Users/cengler/Desktop/CS447710192_Sentaurus Lithography DS/links/CS447710192_fig3_screen.psd adobe:docid:photoshop:268df10a-0d94-1440-a79e-6edda67c884c xmp.iid:714da100-fcee-44c4-8b57-ae013e00e590 Print False True 1 8.500000 8.500000 Inches Cyan Magenta Yellow Black Default Swatch Group 0 White CMYK PROCESS 0.000000 0.000000 0.000000 0.000000 Black CMYK PROCESS 0.000000 0.000000 0.000000 100.000000 CMYK Red CMYK PROCESS 0.000000 100.000000 100.000000 0.000000 CMYK Yellow CMYK PROCESS 0.000000 0.000000 100.000000 0.000000 CMYK Green CMYK PROCESS 100.000000 0.000000 100.000000 0.000000 CMYK Cyan CMYK PROCESS 100.000000 0.000000 0.000000 0.000000 CMYK Blue CMYK PROCESS 100.000000 100.000000 0.000000 0.000000 CMYK Magenta CMYK PROCESS 0.000000 100.000000 0.000000 0.000000 C=15 M=100 Y=90 K=10 CMYK PROCESS 15.000000 100.000000 90.000000 10.000000 C=0 M=90 Y=85 K=0 CMYK PROCESS 0.000000 90.000000 85.000000 0.000000 C=0 M=80 Y=95 K=0 CMYK PROCESS 0.000000 80.000000 95.000000 0.000000 C=0 M=50 Y=100 K=0 CMYK PROCESS 0.000000 50.000000 100.000000 0.000000 C=0 M=35 Y=85 K=0 CMYK PROCESS 0.000000 35.000000 85.000000 0.000000 C=5 M=0 Y=90 K=0 CMYK PROCESS 5.000000 0.000000 90.000000 0.000000 C=20 M=0 Y=100 K=0 CMYK PROCESS 20.000000 0.000000 100.000000 0.000000 C=50 M=0 Y=100 K=0 CMYK PROCESS 50.000000 0.000000 100.000000 0.000000 C=75 M=0 Y=100 K=0 CMYK PROCESS 75.000000 0.000000 100.000000 0.000000 C=85 M=10 Y=100 K=10 CMYK PROCESS 85.000000 10.000000 100.000000 10.000000 C=90 M=30 Y=95 K=30 CMYK PROCESS 90.000000 30.000000 95.000000 30.000000 C=75 M=0 Y=75 K=0 CMYK PROCESS 75.000000 0.000000 75.000000 0.000000 C=80 M=10 Y=45 K=0 CMYK PROCESS 80.000000 10.000000 45.000000 0.000000 C=70 M=15 Y=0 K=0 CMYK PROCESS 70.000000 15.000000 0.000000 0.000000 C=85 M=50 Y=0 K=0 CMYK PROCESS 85.000000 50.000000 0.000000 0.000000 C=100 M=95 Y=5 K=0 CMYK PROCESS 100.000000 95.000000 5.000000 0.000000 C=100 M=100 Y=25 K=25 CMYK PROCESS 100.000000 100.000000 25.000000 25.000000 C=75 M=100 Y=0 K=0 CMYK PROCESS 75.000000 100.000000 0.000000 0.000000 C=50 M=100 Y=0 K=0 CMYK PROCESS 50.000000 100.000000 0.000000 0.000000 C=35 M=100 Y=35 K=10 CMYK PROCESS 35.000000 100.000000 35.000000 10.000000 C=10 M=100 Y=50 K=0 CMYK PROCESS 10.000000 100.000000 50.000000 0.000000 C=0 M=95 Y=20 K=0 CMYK PROCESS 0.000000 95.000000 20.000000 0.000000 C=25 M=25 Y=40 K=0 CMYK PROCESS 25.000000 25.000000 40.000000 0.000000 C=40 M=45 Y=50 K=5 CMYK PROCESS 40.000000 45.000000 50.000000 5.000000 C=50 M=50 Y=60 K=25 CMYK PROCESS 50.000000 50.000000 60.000000 25.000000 C=55 M=60 Y=65 K=40 CMYK PROCESS 55.000000 60.000000 65.000000 40.000000 C=25 M=40 Y=65 K=0 CMYK PROCESS 25.000000 40.000000 65.000000 0.000000 C=30 M=50 Y=75 K=10 CMYK PROCESS 30.000000 50.000000 75.000000 10.000000 C=35 M=60 Y=80 K=25 CMYK PROCESS 35.000000 60.000000 80.000000 25.000000 C=40 M=65 Y=90 K=35 CMYK PROCESS 40.000000 65.000000 90.000000 35.000000 C=40 M=70 Y=100 K=50 CMYK PROCESS 40.000000 70.000000 100.000000 50.000000 C=50 M=70 Y=80 K=70 CMYK PROCESS 50.000000 70.000000 80.000000 70.000000 Grays 1 C=0 M=0 Y=0 K=100 CMYK PROCESS 0.000000 0.000000 0.000000 100.000000 C=0 M=0 Y=0 K=90 CMYK PROCESS 0.000000 0.000000 0.000000 89.999400 C=0 M=0 Y=0 K=80 CMYK PROCESS 0.000000 0.000000 0.000000 79.998800 C=0 M=0 Y=0 K=70 CMYK PROCESS 0.000000 0.000000 0.000000 69.999700 C=0 M=0 Y=0 K=60 CMYK PROCESS 0.000000 0.000000 0.000000 59.999100 C=0 M=0 Y=0 K=50 CMYK PROCESS 0.000000 0.000000 0.000000 50.000000 C=0 M=0 Y=0 K=40 CMYK PROCESS 0.000000 0.000000 0.000000 39.999400 C=0 M=0 Y=0 K=30 CMYK PROCESS 0.000000 0.000000 0.000000 29.998800 C=0 M=0 Y=0 K=20 CMYK PROCESS 0.000000 0.000000 0.000000 19.999700 C=0 M=0 Y=0 K=10 CMYK PROCESS 0.000000 0.000000 0.000000 9.999100 C=0 M=0 Y=0 K=5 CMYK PROCESS 0.000000 0.000000 0.000000 4.998800 Brights 1 C=0 M=100 Y=100 K=0 CMYK PROCESS 0.000000 100.000000 100.000000 0.000000 C=0 M=75 Y=100 K=0 CMYK PROCESS 0.000000 75.000000 100.000000 0.000000 C=0 M=10 Y=95 K=0 CMYK PROCESS 0.000000 10.000000 95.000000 0.000000 C=85 M=10 Y=100 K=0 CMYK PROCESS 85.000000 10.000000 100.000000 0.000000 C=100 M=90 Y=0 K=0 CMYK PROCESS 100.000000 90.000000 0.000000 0.000000 C=60 M=90 Y=0 K=0 CMYK PROCESS 60.000000 90.000000 0.003100 0.003100 Adobe PDF library 10.01 endstream endobj 4 0 obj <>stream Adobed!!##!,##!.333.!>BBBB>DDDDDDDDDDDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDDk"   }24r!1RSQ "ab#$%&'()*356789:ABCDEFGHIJTUVWXYZcdefghijqstuvwxyzCU1q!aQ "#$%&'()*23456789:ABCDEFGHIJRSTUVWXYZbcdefghijrstuvwxyz ?V&+Sik>@ZLSXMOjm2}Mb6>|u5dϐ֦'+Sik>@ZLSXMOjm2}Mb6>|u5dϐ֦'+Sik>@ZLSXMOjm2}Mb6>|u5dϐ֦'+Sik>@ZLSXMOjm2}Mb6>|u5dϐ֦'+Sik>@ZLSXMOjm2}Mb6>|u5dϐ䰌m9@+h\TMOYsaO20}p !J)J Ce%lHڌ|6PQ(N3lΞN Ͳrw쪢ΞN}>FtrwSs]9@}AO5ѝFtrwPPTkG'|75QlKK [\$iG$ `*_R%h>􎈱%&4⥚㥚$"TDHJIRj k"yr,jy,i3%˕tEUV]W)K0k5DvQdo#C!GO5GdF|1hƜcZ'.bKD<Ϛ1Ø{Ѥە(Zqᰍ87e$<ռ 4Ӈ.dN*4,,&4 >Sɥ$3d9ц{qEr(dj +"R¹)RorG yB^K`N\Ñ\gN9F M7QvKfS3Bi@5Kʈ b! `'\jcL5[9O #T H 1F,,r,hMͤd$,2Hic{ܟ%&ff88HC( @^/KhJhǑSQ=cӆ|@R >I<$HӖ9z웢3e9[$@ҪwI4e%/W2OЗFhS2K0|GN9dӈ25ϒO$e6i,b'QkTJ0y]sF UDӀ9.- UlIAt9&]-Oy~YeΟ2=}?q(GO37׾3j)G Kž^Keʛe$ie z. d#MdY0|(,ϟ%JO#6̱4)RÒƪjohjO`^RyhT"F_3F4N/*b&*iceC6sj'R8o[$Ry $U)rEcK}7dQ>4&daZG$ʲF1L0)*AP{*cJKqf^(Tz.,1Q|qƜwZ01>APr婳@rF/x M5'4cqʘ %f>8M4"M>b[%r ⩌JdB\iJXe٪I5:to(I (dF4O#qv1_$"lH\ZlLd2͕捰&)ƜRȲٲ<6)K0ѧFp3MSt˕a i8hF1R  ʜSI6hr6E{އTQ5I4 9>O&[Nf:[ n%Ɍ9&X2JT,%tM$#6},נfe.mrE-VP0,|V|&WAF0u,9&٠9dX5FXB!\hORTeB9"5q$dȟKc櫌MD UD nʜxerH|}O>R>H—g$ hp\lKdRɕrI4Ч K8B^JrYh*pDYPN0&[*6QK. ejҒjq|qNI#VG>M,c3#|h@Ќ#J/hAdSᚘMI BkɡU7X'Q ?$%>EK EeG%vSYGŢHժtutec'B18rƛ#IdTjJɘf b9U"'#j6VdFBb˵I$ Us9t?+m-Ir*t*A}g(RrI/"1ԡdYC$2<2A6GnU(tjX R짍*/W2Gl_`ϕ媚:vVvƜ2lzY.ON9,шdFh |%lO&8$(F0,iƔS &ͦ\@JE9T ɨ\Z֏x~hӧWlsV J1$4%9fxdIoPqk.x׀g(Uƕ ̽QlcC%ˋ0 6e7nC%5lѥnV54Jy_2䨗`TK=*e*eg#4_-L|4iK*% endstream endobj 5 0 obj <>stream Adobed!!##!,##!.333.!>BBBB>DDDDDDDDDDDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDD k"   !1AQR"a #$%&'()*23456789:BCDEFGHIJSTUVWXYZbcdefghijqrstuvwxyz !"#$%&'()*123456789:ABCDEFGHIJQRSTUVWXYZabcdefghijqrstuvwxyz ?|~ϝ\6NS:m8{< ֧>uph֣=ixZ羮M "x݈sU "y7J;"=h9% { <>Ĺ^ȆG<|e {@/`QxُIEvJ*8vBSQ$Tr_$9uD&v)!r@ʜ 0¾)\FRToѝUBS9)Ŝ]ʙFe7L5 vY^%lЩ&p*b[ux@'9T'&Qt9T NP.cAT&, P/2/_ĥXUFf[5)UTtƘ"Vkm`gZ[y,0*jȓPVL'Sm("Fcu8CL%t$&5IF,((O]r- JQe:T@8v(ρEIxr'r6.P )I6m"e,YLNL*I6n2w+L +FUBQ U%,7*L1ecIB QR4uY€AԹrNeeE D3nbBV-dl-pfxRRZG5܀?˄qʤ+Bx=&L!,֬n'dHE\e@ K{u ٍ5,gKV]Ƭ}8>stream h26V0PM-ILI,IT K0 endstream endobj 7 0 obj <>/PageWidthList<>>>>>/Resources<>/ExtGState<>/Font<>/ProcSet[/PDF/Text/ImageC]/Properties<>/XObject<>>>/Rotate 0/StructParents 2/TrimBox[0.0 0.0 594.0 792.0]/Type/Page>> endobj 8 0 obj <>stream HWrkx$S&eUK&5oFy Ej pl'9 c{F@}pr+;|ݠ?x-._~ XXEAe$SU7jq\,d`Qye, e‰/ԏ{ޒ0Gާ廗o^gZT۶ḱ]-|F^8vBB?I|pWvmPz΁M m-zU5LhدGT)J+vՖqpMV{QɵXөTEnM;]Par7΍:y$xer%ŘmyU7Kqxd8 aHN 8CΈJ٠VB`f Xc8eŤʎ^И" $rV[uw/Е6 _ G"xsMͷ@&P1-1U9 N\9=CxlX#4_ 3zաJ̕7;g#?H|SD' 8 G(>L9Tov#2[D-)y[vUHxEnƷٰ75{ ֣N$>6<4SFvHln4(g)GR yux3we f6&oI:H{̟C1 x! 8/ ҀJdȖ:9'{#]Y51f~NqdHbKFԀlsA z4݈y^٘*>pypǞ8`Ǘ]v`9qgij';/ʐ5$Z .YROz,Z CKẹ%iQlwIzX/~BT9JZފ2Z Fmg-z^YWETe3zE$KG7`L1DD0,vhK(P,^kv|+x:6L(p&lmʏC0{'YyZ A̓;=awH)ށ߈u ɍ1I;}97Xd)Z LT =H<'^S#Im ԬvA^7R%YVfiZ\l<ԣLC)ŏӈ~Hi SUG,@^ `0UYDdq`;ϵ5o|`VR'3'.8qr嵴MspSHVl$y~š ',z(=ƎhvI4BQtO-@Ui%hbm1ixDZO$%ǻv-ϲq61Uũ]1y ɶ/мu/H [{j7?Wk=ˮGR'?j[: FP\30\")x~bFg.@=ЋlRqp޸iI!|J)وWvndorvVcܺNÔ֒tYij+r$u'BiG$u>\t砰SS`Cvs ' O•:%jIUtVfD,܌SW׉9X;e2 Ms*!j*$JHafJ[7^qaW˝hip~zq{cKΦٽ$ f%"m>T{(ER6ѣU7b I;@z@u'f#1L&fgG>{ԴܓFݯϽI2jꮑ#3܈%*j۱L@ J8䛅:@WB*|E;tAgOLbVDv."k !C4J_v){(qm_l(L"gтmljCeT%̱~Zi-hړa4w,$ .JٮBѝB10Rk DH47a# dÇG]K)yH)W_2KkZ <Z.1K|cn]:Ȣ endstream endobj 9 0 obj <>stream application/postscript Print Cynthia Engler 2020-01-20T13:25:47-08:00 2020-01-20T13:25:47-08:00 2020-01-20T13:25:47-08:00 Adobe Illustrator 24.0 (Macintosh) xmp.iid:47575cfc-1341-4625-8cea-023719965122 xmp.did:47575cfc-1341-4625-8cea-023719965122 uuid:5D20892493BFDB11914A8590D31508C8 proof:pdf xmp.iid:bd9b31f3-e019-4844-ac70-2d879f84f132 xmp.did:bd9b31f3-e019-4844-ac70-2d879f84f132 uuid:5D20892493BFDB11914A8590D31508C8 proof:pdf saved xmp.iid:bd9b31f3-e019-4844-ac70-2d879f84f132 2020-01-20T13:25:25-08:00 Adobe Illustrator 24.0 (Macintosh) / saved xmp.iid:47575cfc-1341-4625-8cea-023719965122 2020-01-20T13:25:47-08:00 Adobe Illustrator 24.0 (Macintosh) / converted from application/postscript to application/vnd.adobe.illustrator converted from application/postscript to application/vnd.adobe.illustrator EmbedByReference /Users/cengler/Desktop/cynthias active jobs/CS447710192_Sentaurus Lithography DS/links/CS447710192_fig3_screen.psd xmp.did:48dfe0b8-5dec-4f10-b7e0-346f800be7d5 xmp.iid:e27d71c2-5f76-403f-86ab-3d0bc659aeba /Users/cengler/Desktop/cynthias active jobs/CS447710192_Sentaurus Lithography DS/links/CS447710192_fig3_screen.psd xmp.did:48dfe0b8-5dec-4f10-b7e0-346f800be7d5 xmp.iid:e27d71c2-5f76-403f-86ab-3d0bc659aeba Print False True 1 8.500000 8.500000 Inches Cyan Magenta Yellow Black Default Swatch Group 0 White CMYK PROCESS 0.000000 0.000000 0.000000 0.000000 Black CMYK PROCESS 0.000000 0.000000 0.000000 100.000000 CMYK Red CMYK PROCESS 0.000000 100.000000 100.000000 0.000000 CMYK Yellow CMYK PROCESS 0.000000 0.000000 100.000000 0.000000 CMYK Green CMYK PROCESS 100.000000 0.000000 100.000000 0.000000 CMYK Cyan CMYK PROCESS 100.000000 0.000000 0.000000 0.000000 CMYK Blue CMYK PROCESS 100.000000 100.000000 0.000000 0.000000 CMYK Magenta CMYK PROCESS 0.000000 100.000000 0.000000 0.000000 C=15 M=100 Y=90 K=10 CMYK PROCESS 15.000000 100.000000 90.000000 10.000000 C=0 M=90 Y=85 K=0 CMYK PROCESS 0.000000 90.000000 85.000000 0.000000 C=0 M=80 Y=95 K=0 CMYK PROCESS 0.000000 80.000000 95.000000 0.000000 C=0 M=50 Y=100 K=0 CMYK PROCESS 0.000000 50.000000 100.000000 0.000000 C=0 M=35 Y=85 K=0 CMYK PROCESS 0.000000 35.000000 85.000000 0.000000 C=5 M=0 Y=90 K=0 CMYK PROCESS 5.000000 0.000000 90.000000 0.000000 C=20 M=0 Y=100 K=0 CMYK PROCESS 20.000000 0.000000 100.000000 0.000000 C=50 M=0 Y=100 K=0 CMYK PROCESS 50.000000 0.000000 100.000000 0.000000 C=75 M=0 Y=100 K=0 CMYK PROCESS 75.000000 0.000000 100.000000 0.000000 C=85 M=10 Y=100 K=10 CMYK PROCESS 85.000000 10.000000 100.000000 10.000000 C=90 M=30 Y=95 K=30 CMYK PROCESS 90.000000 30.000000 95.000000 30.000000 C=75 M=0 Y=75 K=0 CMYK PROCESS 75.000000 0.000000 75.000000 0.000000 C=80 M=10 Y=45 K=0 CMYK PROCESS 80.000000 10.000000 45.000000 0.000000 C=70 M=15 Y=0 K=0 CMYK PROCESS 70.000000 15.000000 0.000000 0.000000 C=85 M=50 Y=0 K=0 CMYK PROCESS 85.000000 50.000000 0.000000 0.000000 C=100 M=95 Y=5 K=0 CMYK PROCESS 100.000000 95.000000 5.000000 0.000000 C=100 M=100 Y=25 K=25 CMYK PROCESS 100.000000 100.000000 25.000000 25.000000 C=75 M=100 Y=0 K=0 CMYK PROCESS 75.000000 100.000000 0.000000 0.000000 C=50 M=100 Y=0 K=0 CMYK PROCESS 50.000000 100.000000 0.000000 0.000000 C=35 M=100 Y=35 K=10 CMYK PROCESS 35.000000 100.000000 35.000000 10.000000 C=10 M=100 Y=50 K=0 CMYK PROCESS 10.000000 100.000000 50.000000 0.000000 C=0 M=95 Y=20 K=0 CMYK PROCESS 0.000000 95.000000 20.000000 0.000000 C=25 M=25 Y=40 K=0 CMYK PROCESS 25.000000 25.000000 40.000000 0.000000 C=40 M=45 Y=50 K=5 CMYK PROCESS 40.000000 45.000000 50.000000 5.000000 C=50 M=50 Y=60 K=25 CMYK PROCESS 50.000000 50.000000 60.000000 25.000000 C=55 M=60 Y=65 K=40 CMYK PROCESS 55.000000 60.000000 65.000000 40.000000 C=25 M=40 Y=65 K=0 CMYK PROCESS 25.000000 40.000000 65.000000 0.000000 C=30 M=50 Y=75 K=10 CMYK PROCESS 30.000000 50.000000 75.000000 10.000000 C=35 M=60 Y=80 K=25 CMYK PROCESS 35.000000 60.000000 80.000000 25.000000 C=40 M=65 Y=90 K=35 CMYK PROCESS 40.000000 65.000000 90.000000 35.000000 C=40 M=70 Y=100 K=50 CMYK PROCESS 40.000000 70.000000 100.000000 50.000000 C=50 M=70 Y=80 K=70 CMYK PROCESS 50.000000 70.000000 80.000000 70.000000 Grays 1 C=0 M=0 Y=0 K=100 CMYK PROCESS 0.000000 0.000000 0.000000 100.000000 C=0 M=0 Y=0 K=90 CMYK PROCESS 0.000000 0.000000 0.000000 89.999400 C=0 M=0 Y=0 K=80 CMYK PROCESS 0.000000 0.000000 0.000000 79.998800 C=0 M=0 Y=0 K=70 CMYK PROCESS 0.000000 0.000000 0.000000 69.999700 C=0 M=0 Y=0 K=60 CMYK PROCESS 0.000000 0.000000 0.000000 59.999100 C=0 M=0 Y=0 K=50 CMYK PROCESS 0.000000 0.000000 0.000000 50.000000 C=0 M=0 Y=0 K=40 CMYK PROCESS 0.000000 0.000000 0.000000 39.999400 C=0 M=0 Y=0 K=30 CMYK PROCESS 0.000000 0.000000 0.000000 29.998800 C=0 M=0 Y=0 K=20 CMYK PROCESS 0.000000 0.000000 0.000000 19.999700 C=0 M=0 Y=0 K=10 CMYK PROCESS 0.000000 0.000000 0.000000 9.999100 C=0 M=0 Y=0 K=5 CMYK PROCESS 0.000000 0.000000 0.000000 4.998800 Brights 1 C=0 M=100 Y=100 K=0 CMYK PROCESS 0.000000 100.000000 100.000000 0.000000 C=0 M=75 Y=100 K=0 CMYK PROCESS 0.000000 75.000000 100.000000 0.000000 C=0 M=10 Y=95 K=0 CMYK PROCESS 0.000000 10.000000 95.000000 0.000000 C=85 M=10 Y=100 K=0 CMYK PROCESS 85.000000 10.000000 100.000000 0.000000 C=100 M=90 Y=0 K=0 CMYK PROCESS 100.000000 90.000000 0.000000 0.000000 C=60 M=90 Y=0 K=0 CMYK PROCESS 60.000000 90.000000 0.003100 0.003100 Adobe PDF library 10.01 endstream endobj 10 0 obj <>stream Adobed!!##!,##!.333.!>BBBB>DDDDDDDDDDDDDDD  &.###&3')))'3>344443>;DDDDD;DDDDDDDDDDDDDDDDDDDDD  &.###&3')))'3>344443>;DDDDD;DDDDDDDDDDDDDDDDDDDDD/X"  !1Aq2Q"Ra3BSr #$%&'()*456789:CDEFGHIJTUVWXYZbcdefghijstuvwxyz !12QaqA"#34BCRr $%&'()*56789:DEFGHIJSTUVWXYZbcdefghijstuvwxyz ?!@:U~w*Grn6l7>}j@{ܮ}]OFc:| =z$2nAI@^ODvHξSj>ap Rnq%otm*MNZCs-! xrAI@O枏ھ+}qыkkx\ԁ/{C١yըV&`< @De'ʉ ыGdhNkI. eoCG Q}BF ŲQԍ )Ijj S@!@!@!@!@!@!@!P䖶|mVF ӓ{_wX}B Z=Z,>ZF`quGº8!^60&թF$^RM/H^|;}e]iO.raRt ^tjq'yLZӴw1_wJI\J)cyK#08(3pgq?4#RkFW#4-ҥ9roYYrBxupz=>[ҚtҾBՒ=0ڢhZfl)ƦiѤ"1%kݰ()/~yAS<9SWsY7KJ$>&m3<Ў)46,Cl΂qJKZbM,3F#MI+f}osJm2tq5K#̝&S)Iݷ9ȴ 5v5ѵ\lӱ4:3w*T$k.ܴڍ%4>¾Щw֝9N8׭˱c:˱c\cT)ķ4hG[lb\+6VRk^Re:oiNMgur):o)+ hzĈf oJ[7hbsVby憼]Ytg6+tj̋K#ZC*xv3+txӾI\[)iz<4>تU!9j =Kl ]MYlGLZg)_|-F,Q-֭Rg#+ vEa̒YIf^UJ6W{KJq7*3DqP'hȅ L&[|i3ԞWH)+-٘hxޯ,SШ ͽ/(!g~B YuN)TcBXZgݱF/$PiQï15"lqnड़W41jraJ%{$!j hwڊKgid')Qemf5-wdIܷHRP=i愫 B]8N̝wvCmiIOD;,\V催_+IW.{iPƽ5~zϕI7(ec6<Ң*B# .Ӫ+Ef{vxQ} a٢Ō5Oլ󧩞O=jnJйDWx?vӌZl)mgl1ZȨKpBFpX!_ˎ:hܸ3`)QYG#ݥTPY#vZLCzv/BPaA\eS+ZXDd'FFxUi9:2Wj$J -=Lz5[o^iNiIܴ لm#Q=cAٞƋx)I<S}.*:ޒ̤* $^*Z[^ͥG wgF] rl4 ^K2,ɨlu $8$JyItN-LNGRtsᾉ}fբD/d[th%GGӤ6Stqe,*p1A{ai⡶_ axV{x  Bejlg4qQKQ6 k5_Ÿ.;.lEU gϦUԍ2E *G RijYL橰Dh3Gw@UUbJWC+VEU%(_P[qr kC/tX)KCnJٟ>pBOl{0ԇ-*%A~Pd.(1;a7̮S\ tJkEv ›Vmfe:JsDy!*,.MIo(6t Hd ЕSXZ4Y)jLQXW:R-vw`%u.v5'qQe46B+^4AenCI,Q[GKqQYYhZ7)F%5;qYeEl)ms4s!_ˎ:hܸ3dSv1ӛsQbvz,*[O].A"VhBZ \-G5(y}50uG 5}lNǡd cU)n$IYRA'-/%)(ɂٓ)TmMZ a j.\(ݣؕH^L*N.<>UtT}IH  iES,zEY "at)$Ԋ,)rʈ$ _]`E!phF.3>|cuekB!6Tjgy𓋹67 tअMCP4d "*Qqr}lyV{3|jüO`!@c9zM懍ϵ= l@YKM}P7=KɤWE(FJ8Y?GQ]E5 b-\;%wU9\KLEK& K:֡p_Y^ $<=t6Z5}+8"'4^kPQ{Q]z*%%rvCZgP6Gʎr=Zlx[R<87ubg3/|u"WC¦TEI%Hhqzy%8Bk/^R|#mrʪŒ$NTâ =rHn瞽N zөk-m٢p\Z>CRmѩW 7' iMg{Ѩ;׌T[rmh!;鋪QPjUUdiU[-窒VMň jiޑ \d/R+EeJmv-" 9UsȨiH ˖n+!_ˎ:hܸ3`tNSMbhsBY$S[,VhPgF1ɩfz"+eg|l;+*1>bneVr/az$[Y-${eAS=YP\%}h!9(AׇCYZ2M7q +ofy*+4VA鮜w Jzo ꆗQᲛy`VĊ]ey 9gt|y\қ變5)VQXflYTʒ89Z*-ݽ"`;1LS0^u6)lG9F yVf\!1x!sMy0qRˢڥuY2Wnu*ۂєOU;m%&8l+is@X6Ou5h|zFl}9fRQꕆ弯Lm[f?Z2=.3(:ο!_ˎ:hܸ3`V,uȂGs_2; JE}ŖIj.'|u!1ɩڪdSUI4冥Q炻=\гQMtHZ! )hx\zHQI/9 ˊPytNqĶ%Z\ Xᠾ4yk6)џB]dZAƽ$xf1$e]UGjV[GA_\$T&Nc-x 1-J;K^f%>(JQ%N#*7Ƭ;>fՇxKrs)B sCYgڛ3ejzٹՖ 4d^(*]"6hz-ѽف٫j6n(SZ)4HL$=!<Qⴉ@0^ke#_)2 \1 KiJpMIQB.ZwM]Mpiw돟eDg"Ghl6 =h_!:[ԋȪTXaS)"AJqv)Mx[l׫ENIIi "tEv! A6'oJ 22<7lFx!*WI?rJpZsi )S'Eu6R /,uy"ztfi4ydz‡s)'GʺqBsm9zj'.;B\VՈq_!_[̎[k$")FncMJRMm#y,Aq8aIx(BILSL#PpȽĐPYH  iFy9ڧ\ycyH` biȽx MZ) /ST%Jd%;"\-& O\F"$HR|h7=C2 >%h#S}*|TZeެESZq&9*B=YXXEF)!qbW2 64S@) .]ӎgȝܯ,4*pĵtc*KRVUrhwG9S{o'. z.,6ҔC7Vy87Ƭ;>fՇxKrs)B sCYgڛ3ejzٹՖ h;I7ʅ  Whi<2֖e]2%FeSQIX "嵚Ux׌^YEͭ\}6 nj劰=!bN3<碼+jÀ%$N$IZɡQ.F6C9_#OIImG<ϫ5AOj 64ՌO h9iR@l+DeiHVk0S!:F;_MTj1vHѳ$b۽y5gP9+a+^f@;-`48x2f4Zkz4!(ǣZ=RDޭUr}!\:s%}(;t{iqQ/,w+Vyl(P(/`8٫7k;Uݦ 􈨵nBoJt_!_[䢤#Gt,as/mxjSďd<r!n ˁA6^N 5X^y݋`QR=CcW@$^QX44SZ 5y,LxƗ84h5:2*FB>Q~9mD-* މa%y9l*9Nj*7CasoK-@ַ48zppf):+Z';Z>U9:猫#YED.,}K:fAME"*ͻ6v(Rܶ(NM=ϢHI LG4Bhq|Dxy|OnQt;K,BiT^DzmNVҦUZv#Q;lZ4efkDq (ť@b`^H jYݼa'r4K͸ͮC*s2 zj[-PNVd3ݕZic׉g2ţ;jRBV Bw.)u."<+YFon(DŸOi^e!]lgbME-yhx.zIE!_ˎ:hܸ3cv1%3q)o,QŮ9AZJ Hkxh(gbtR͖c<84|xRy4⦟!(ҕ=ۄ DiʾRbxO=.hw\Hfz ScвHH64eTfօ 4Pn]}R¼VX򮊱žK-X0@iWL ,ԋ)(m2DAWI6YYPbh=1&SGyBMdMɯ^WEgv_(\X̒עaaU=eJ4dpWIlyV{3|jüO`!@c9zM懍ϵ= l@48z[z/ww#gb}8ʤ,ڼԛ%B6WUN hU HX^]F3Z=G+)ѰʛnCt[_.B'Zx֡/L]&i);j!`bq@&r[/^I9f.riIkз 0n O^BVj5!bi>鷳ۗU\\2N{ .y,",iTb֜$z}L4lYSN,cYԡQ~vHVV<,oCx': cve1Y֜>5撑e(! XfUZn >ETִ|-[cÛjQFrvzfݏv$=ח2ZkK m*F؅e؎VǙ5a'7Ƭ; [p M@!37>٘hxޯ,SШ ͽ/(!GG)n&挡4^V PRoLHUiE9˕o+Z8 J̈́ C/,vԦ8Ika(rm:2ijZOpնBK^ dN1k*/m' sT( V^2 dtMCYU5IuF攡M_TYb.+ݭXZ$1~K*T3Q)YGKJZRx(qtYT)鈕LKF),%eQA%<'k' u{/ug rQjyXZ s*xҜ]Myk̇%jUsKNyzԥwdz\U(" .q'Р.s\-sf@/\M-:z.8),]9թ +Gj*; b0ٮ)-VÙ|xMuc̏E mmX^jqV+*]ۇc+7n z aY+gƷ&BUd9X!_ˎ:hܸ3`rQoR)qKiѮZ%n4$90!g-nz1Ǧ*#ϨE")3TfӠ$rS⢪υe"+! 0-X"P2) W*(bbhR=IV7Υ>q%UtJQiǪ}ɻEcUr|aL+BKף/6K!jڔ=V2geR6ΚJHeӡXhaQrpδQI[-Vr=;xaGyXy{)HYV@ab6Ҥ]V\L7g+cxV{x  Bejlg43y ˚vk!_ˎ:hܸ3`n7:^M\]%Ze)zr%]lH$=e3Dz).V $Δ]*M*+ܝ:IYm) z˰Y"Ղasuӥl޲Su!NjsOK"Ҙ;2q'Y(ʂ RJZk|tS/KNS2Whoͣݣ[W "k;ch Af H$I>7:ŵ>*7ȵڡԖߕշ߰!YhWmWJ($4^;D銲$՝5ձ籹2<=5a'R܇ hB 1_YsCYgڞFl6nmy@e"yHg{+t8xmʌFZ<c;ITF4N~b7Au7DM^o[´V1 hX% ]BUV$yVঙ5*Y)ksbMeEeoVNjAhz [ɯdv]4>A1`] Ӷ2/ISz\"1Z!FJs)1+ӱzOBzOFXfuǪdZzgA=#zh7J=QQfՇx+zs)B sCYgڛ3ejzٹՖ hC.`o&Cv (Ք}sVr>nislCY2XIrd^Y*vl.7ȑQQ%%dS`:ӹnI;چy7f\+kw9٠RR# dnjߔLk:>༾f~ߐj-ҜyːqDُrS(4jT\FS! N*^iuOZyWZ2*7 $B}vtt&]jX֦6 +}k@--QyN!ԺݏJXH3!SbR@YM rx7ˑfN^5xňl9)턱+(;zSIJ:ʋ!.)҈ ipcvW>6W˱ڲYïڹݰVRio/=v48ٱݬ4Ϊ(E[ՇxAǰn4!hޯ,Sڳ9t676ܷɸFǎ軳݅E*'.%&ܳ5'%,A՞R镏.RC_fO$gWRFHm/R_l_F8)XoF$Faz"w$L OؔhmI,Ջ!,5\v6fý4˩dv6®IV>%@LZUZ8mGE`7 PkhLj޸\F1o8+ɮ3h[M'D/V]=Df\B/Z0[Q72b *R>yiNeiݶ6AˎTK*zEkE鼽PVErIOfҨ-*u$J![fՇxW[ M@!37>٘hxޯ,SШ ͽ/(!7(=5xX !n`ZULWo %tEroyQu!fEK2^zyE%)ZiOm)b6ʣ.kg\ q&,{ s1lh^(ԥ%sJyqVq%ʎeukE"<. [ڑ\Bz[Y{s~gɣ=iU#Brv!{k5ྤF?z4F*G]nzVܪi1"MkI'(&!$\ˍbI@ԟ#ZRdg 8ʒtҪRzzT/8kt3YO(Q\dukIv®Kj˕{\X./N).8%ax.~nb!_ˎ:hܸ3cv1H^pȊuVQzs+4}PNKꃺ*I$㢯>KQaBjͲRB(Z$ʱߘ,έ3|jüOas\Gja70@ B g4DyA8]c;zHGQg+,"T䏣uJ-sI{UجH㔕)&;5!_ˎ:hܸ3` -ujEx ̭@m@D"iȡ'0$Jo`8[UŸ iԏFSˢ: R%x%d2=5IlE zsW#BHehsj ),JT uMGRl c_&b];Z-4Nյ94c-UC,)؎Yqv# --A+4⋌}XJ I@*x`*CT`]ZZ7մ&f[ )OGivIE7z qѠ+!H҅}z Bejlg4hXmfN.ZGѠ槙4~)j~5u63HJk+aԮUuˈu㥍=:RIjGr1Wx]lDȅ8g7Nj"!@c9zM懍ϵ= l@4uQo& SEԨ3ţMlwmD2uWHqU ؀˫)zcS E6'Jp'fWWM QM}2a׹0;D6ю™KAf * Ԉ)e>,pE&,+|.ճE1֏ͲѲϴǰς/3:FW,Nڰ&䤶İ›<6'zz$rn0 )ϊFd&FD,2.մ@'BX\nI-R6MDxl Y^#[d8𪜺⪺ˊ_(NQBXT)Ic2]BQXEVmMJ +-kymHo= (ՅFR*h\Gz),-Gwkj*/64Mvk!_/-M* SW>?XWJXWEdGV3sWAF.k4yNm$f㨹a"ɘ衡i{c j:=]"8ϭGDIuyKBC)eHC.1.zҺWލ^*MCTaeYN1[ FhYW4ʆ*sViw|o#,JnTjى1[d=e}"zdLONh >Ҿj) Tyyq$Rm3YNJ_z5`FʱO24Eɑ%TOi=:-M C!+(5cNXϳQӣ(5G-n١K 4xi:Di|*dM6#}+ _z4z6CGP[6X:ؒ.W}+}:ҺWލX ʲc]+DKNx]CXCWMr5JUʴ.*mf~ʭKI{gȣ,."#1 %!w0cW9^. }- 4}~fttH»CϤӓEBqKuW),>Ȱէ}>ᾱ>/L%Ք!hޯ,Sڳs+R'6ӻ䳵ܕњֶڲfԲ˷>.ឨ%f)ɳ0+EjF\lxq˷}}]JKI%Xo4P2 ݦYfng˷>.d>E%e<5=cs?}]uYYr` q-wŖG'iњyF0J)?GxT3jÃ9anyv a>Uvұ sR}˸k Rˢ̪a+$Nes9e$rs@CnWE [EraAe;-H3Z=p}]uyvAcDD{M󣤿!@K)t:^ ,,}$׹-ywq.Bx\_3@hz  +Et+|iw O&ͼd-Ao\}zTaF VHp:@"@M}c*p9bPl}=kKnOޏn̊:,@Hyq!   *SXM]3Ъܻcqm%_=Ú<]ucۣ/Fڔce$b<%xѠ+dQ AIFH!@!@!@!@!@!@!_ endstream endobj 11 0 obj <>stream Adobed!!##!,##!.333.!>BBBB>DDDDDDDDDDDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDD X"   q!1AQRaq2"#$34r %&'()*Bb56789:CDEFGHIJSTUVWXYZcdefghijstuvwxyzu!1Aa"Q#q $%&'()3BR*2456789:CDEFGHIJSTUVWXYZbcdefghijrstuvwxyz ?!@!@!@!@!@!@!@!@йE48S8ao;"J+2w\;e3+nfQ[v1HZQ\IM]޷J=DӚO-!@!GIB.RБѦ?3;JeSvݴ^ɽ{,G (8.HС8Ԏt],srzb":H/""S8Bv+,a9]t+>uQuʫi6MCDv":Hd.G,VR>h1HhV=;gW@Ȝ9E|0p AA+CG#-p7y5Es"Znn؝(-PA%k $g8]̉g 4M=қR3ZuA*sBDh r1 mjMt8tViAԖjvSq4;hFtZ(gxQmGIRie e"}&0e_Ŗ\R7Է%j-W^(Uike zj;ƚ}SB ш:G|:G| 40l:#!@!N.Ri$OZXU*tiJЎ>HآS8n+JiNT(U8۲x8Ԃ]F{Ih8V@Tz`M_,QI,xVvMX;2Pi߱T馸.w2U\ɀc2:lrZRe(-W/Pi5nZxlg %f]ecERO)ĵ'gZWcnOxU)\cwl.sD1P2ېzʸœA /ũ Pbk JUf8AW0SzWyc(K(b;ũp'UYh:gy LQO ;إ̃^ő] !cna!G҈:G|:G| 40l:#!@EIkHeYS;^|mV3:&r[":EC\Ҽ(B+Mq$b-mV#;NBA PjY-%#>6$ֻaa)kYkE%IK i 8jIh;@5m.11wP/xc%И6- (IE#1T z -l"힮JTTQũ Pڬ\IPuY%=Hβ.Xl}!Dn6 nٽiu19gE2C SYImd-IKGlXқ*V SUN:PHok ]L U%R-iZQ8M9;PBsS@@ӈ:G|:G| 40l:#!@Wq؊WB#TJrܹ, ޻>r˸+b*J1+%'.ЊRX+E#L4dT_x\.RT|[=vȿgl,EJi2wL6_3ʄU Mp" 3Ni ;2f!qw[[PY^hRW]2N*8)&x:YBU9&''YEN.2Ę#,9sƫCt_ĔI)Xh$JD%a%)N >!$8y?YƬŜ供_e;=O+,\(R}"pBԈ:G|:G| 40l:#!@=Oug P>)N uC)&{"9T'vjAp!pA .s>v:ⲹǤϱӭ(=6ٕ޳*ɪQʪ°&ϱձ띱<[zG$rKAمwj‚3%v]cFYwY 4^y bmyY9V\i%uh"$=N nLmNYLSO]5O F`|>#><_k@GNN;TQȩ򜞡'ajQ lrsVJ.Q{ *c,W7MڛSˑg^k@7m#᪱s;@6w{ ,~2NmK7oAoí:O oV6I˞}g`@Ո:G|:G| 40l:#!@&N4dLm2~4ˆ6Jy6U1hJf; Pb`wc^'fR{jR>4waz8ۆk2l߷D4A\#'" eh'EKe N\O0mrIyQ'U(J 3gTaڑ`oj>4ر,,ܲS<0ĵU DWrLDhj:1s: RP(7 hG6{!:&H8H7:l#:IPEVՒ*^.;_ Ճ7ٷ tYPTqJRq#! ֈ:G|:G| 40l:#!@ɔ.VGUAu<ąYVTKEZocl| KgQE%`˝ HN(0'n@b@nJyՂ!^AX#rXbrG`,UV5k9jйQИm&Oh`U2Oڣ|>>GN+xzpҵKmS%YY2OCZ+uTR(zU꾔ά69Ω؍iEF oAV${>#aE x^wamNhWz Qh$=2Nw+X^y:mPzvz`G]lcN;h6 ZSa'^,SA4Mm]*Q3wOU.)HϥA! d`:!G׈:G|:G| 40l:#!@+ԳvcՒ`Kӏjq$*à< pN"Z}XqdzGKŏR|eEK&tTva) )NK-"NӾΌ;cՃƒU#مw8ՄzGM]za}Tu ^ysLS;B)[YĴ-'8{T.Ύmg5s-6c&RtnJpfvrkk!jLf1b ([J =h=2Pue&?*֑(u / Ј:G|:G| 40l:#!@+ujWkQc<7*z}uqrԢ8ۛcK\ RzXBJď@HgN+qgi:md3a֣ 91zk\tg$cqUkRz'3U QI-tug 0ǖp=e^y$Yhm"%Jf觶z+Zk(9倿+[0\CEIjZ&X@Q*ض;,KG4t`!)E\'y}D}KBY!G;M U8"Ħ*CW{%aUmh; Y`( $>vݰ+<jMSO-":ԣZX<͖)QJ91%p }z$6yt/y[hk keUS,Y6nt{CHMe!G҈:G|:G| 40l:#!@xNMmȱQ&;b')6VΣeNev=)s%xfC\qdo=S-.vC+E-xACOIOh>&!:Ԇjg(]NlC:z;ȦZ w0j8.EkN)޴V.2zy)1yZvH&NQY:GHQ5'fv*#H43gFH˥XiF9e:nJu:ƥ9S\sL宔N%aSQ&Y<^K6H9D#SM Ox< kGP1"G|=qtZ è@s*FNG@*FRZVpE ;$NMDJrgר,VeնG`ֵy;OyRtyر];Ü;UqW,d7;K)P ӈ:G|:G| 40l:#!@s_QtYMvG("xXL4y}(]@h8V4祓(v8pEЊ>s I]ƨszUM,=)UElA%dt%bmNR@yrdgIvs4oe 5%,BGF5E-dsZNG93ړOlЌR:uĮGвOC<Ԩ =@ly 0mt87%Ni2(>cpZc i x#]EOZ è@yc5%t@p9MT{+:X\r B$;ȆR{»L< j4GzBua6xx b#E8NMQKiRO- tiʎyeiI⌳E#fI@Ԉ:G|:G| 40l:#!@.̣݈͢ʎ-@sa*u^X.h'b8pJ`4NQ̭N;|X9^=kxN,Rdt^TZӰH5xI-z Q[tۯg䬬CYfc$+<\j>Ӡx{{'N R N7o^a?KA+RF(Sx^{r|yҶ5~n7{ԤQ%5F;p>TNp\@z7{xJݬ5V:k\ᥛ+ ,6"(g>Nxt±ٴ=$<[:|nɽV1u爐N]u ^MZk'ʇZ ݒRv+DӖtS$G>y\'ʼn٦1΂{<[g H2ժ>O}u 2DӤq9aDՈ:G|:G| 40l:#!@$Ge*ɼCԞ].To8ة)Wki!'*sd49(]_( }Gk|*Di8ciTb z|()E,M"諂BѹK9o4WŔƂ(I$#]'"jAiWU•c\xEtuž ˝΍bmf&{q ЪV h,; l+NI:%)ՀV MmM7NeY'ill8 nv"JȕyEgcĉ0JzIm cPV&%Z"to2زrEKUpi }OoAfZ®X#ֈ:G|:G| 40l:#!@W22cV1h= e,-v㝰|SΈ]ŏUqG J10lGP-Gs͚>= AYԎEҴ>61N=}+tG丧By =j ;K7l:RĂPKgq>K>Eǩj#:)M45N-0Χm9]HcczJYUgT4B|$ ^*.➠5(2RX֞a\gNY⨽nMH'`Ό4+m;i-ҥ1e`4jQŎO4ݓ{̬buyHS+^잂'. Y MKȋŏiK Nx݃jnLGIZ )O2IVՁ. hӌ-TMKm|xfGxjM++VZL׈:G|:G| 40l:#!GU۩&EyfR{LTyo|L|Z$5ȁIӛKa)r/}.\/r.X*!8ue:h_NyGJ #z1JCtuJ3)w-Hwϣ޴- EF'hah#ш:G|:G| 40l:#!B6歖!y,Ķn$8.3G/_ũqDu8ޠeCo!а'W7QS_ERF uw-ᔵQǨ! aq-iqӇQm mFMٸ6Zmcl7k aj(g@:["W:XoaUJ,@yशQjMEZX|[Encr묭t=Φ-Ͽ!߀if Z'M4iSljMjQ_<:+RY4r1R%Zhw:c%9IjGSN1JjgZPvv)Tl dtISSkA>tj4UJ)C X&kF*VӦf3UszVӂzI&'YfӒQC⯤ $v,lj&Zu4u1zJjVdGP։A !҈:G|:G| 40l:#!B\ɮ*y7^!vsR\lU\N;&1nQ֦/ن b'RZSQ͉Ǔ8Rm)6uqEq;Űt6ڒnK%)A4wHLmDC4wH8 LW-yQ>c\V%PmIQZAPĦZIZ&-g +r'ϣT`q7)B,~5XYU8:2ŇFP91O:K6'y7tjpJi0&ۓlRKZv̙Hr,š9!$%%y 1hh2てB%-}ZX<IROC&"䞭g nV`+bnSk,5+ۤ!.'WRRzu+ST񂋽j6@:ŸOև)N2ӨWs@&JSt4oN3r{IAC7JYmt`GIݥދ0-tSZ0+-Z*PDjO9RކCIAM CxOh%N\'t)W:'hV# ӆ&"cӏHi-dڇD?pyvfUi>. -!Mjdڊb}.\:pd >zi0). D@:!@U;iJuVEo+nBŜin^<ق8N\vO&nrCLǝ+%b~e[Elǝ5n/t6wE1gh,7uW:kd^^<诱h&, +'d|w[&O_&u*yMh7?((:Q|s':ndE5-s҃72~NYsO۩.tSYbh7?(}+d'72~NYsgrz٩.tSYlZ/F=n,{S\9lZ/FNt CNYsh}Q:{@ENYsn,ӹwE1gn'OShq۩.t8:)ÌZ/I<=M ENYsn,Ng4^yE G=hq۩.t8:)ÌZ/Iѹ#fK2n,S\1h'F甎%q,,۩.t8:)ÌZ/Iѹ\0ы'fsbeh}y>Vn]_Ì㔪,ΫӔICWI_g3_:UzS'tvĭ[Gǜ8G)FRj1ϮXIJ׍ǝ>˶c'K\hwΊp9"Fp*3{{yd餜NΫkΊp*4%ϼIO!`G6.KnK=tM۟fC hKHc䠯>{shzHBJk:mW EG +Ij@FY@:Լ!@!@!@!@!@!@!@!@ endstream endobj 12 0 obj <>stream h26Q0PM-ILI,IT K7 endstream endobj 13 0 obj <>/PageWidthList<>>>>>/Resources<>/ExtGState<>/Font<>/ProcSet[/PDF/Text/ImageC]/Properties<>/XObject<>>>/Rotate 0/StructParents 3/TrimBox[0.0 0.0 594.0 792.0]/Type/Page>> endobj 14 0 obj <>stream HWKr% ]& /|Y1GIxcA <ʣ-{UzӟZV M~{E[VaQ\ׯ8kc9Zח/&{ޕb[n U֬guS^0Ҏ*;}Rz.KC^[}y؊} VطbhU;[nV-{X'8q?Z|/ -e8[K;-! ĩ/ 1f|uD@"<'/;J CV G}xɢ'~t ,;O ~vxQ f|[~k?^~Eo i0[⤠duv,'l6<53ogg nLAsbsC;sJؖЙ+D/#H.y\4pSI(VNt\}zW\+r%)r2_(sp!uW/UNvW1NjhP B4ZX Bdiiyt{ 6L}G l $V{UF~"72B/a8Tu}ȈUWNʬ$K0ShmtLh1 E=B1B]%QuEsG"F8+Jt,|Бq4 *{y B׏X*7"C9Fnz77G,G9Ɗ\~2*lQֆo 陈L70N ::X>D%A4ewlu/ЄɄ? 1 _ X9ϱQepIt8VuOn/4fǼ1dQ^}aH~/>ձ`tLEi\+;:53nSIk_@]Ü`Ol2P/t t5k|2`| 'CW爥Q"NT.]X!< qY!l׎qOT:h]xVdOs6D +J_+2qF /lґ MVհ*)-GD*X|ىЃ "m%V_bK_~p!3@amt -}v< ]d)J`.cQJ+flRXv!;Ėj-U5sʳ6a؏K )i Ew(lqCіp'ݘ^4B7kD7[iFHtYz9s|7?]퇭7V=reړ`*dpIrkk.@E\#j*a@i ,Ҳ\,*sc122V!zCP~G,1g[}3*J¤ܜ)@r'Y-cyKVmRk7kFeJszkQS29 {M1eF(EIӕK'fFje#2EnSe8焲QNJ0[DNN\8DM7m7Rx;rj:,5W1A|RӃh%/*9 `+Y}2Д(Q [;AqJpOdFo'J͋lnAO~l~-t|j$\ -^v; *_5oCÕmWjlt2ϓah4nNaq&I{BBpe&XQk:fb@e8HT,m\d05+}Eߢ SAG]-S+Ҹ*ҘxEUlI/F".5%%r|2L~Űl O! 2XU>9Z^_sG&l'Fbzr\__jOONr`8S Uv*0V$@r? !f0U!~ %?ÞTymsLbV26־ww$ 4P M$մ%.W>|óԲ'S;f&ٱ簭ӄ:ބ,,T'Sɝ<:wK:=tZ!\F聪*ʰD"윪 $UeOBaYxJ˥ m3~){qDU uZr>MPS 9YiCԅhs-5uSkh+]s(k$#|S(*(Jc#}aJ? д(dͩUbH) ޮM;r)[5߽U06̯Xk),YhyR9 sr6SrUּ'k}{!zLMѧX$ݔˠ?tF\t֟"a@؃`_dҙ/ Kޏl)!S,Kl8oև(/lzԄ˔ڹ/H4 }嗬!otńdPz'ۼg[`:}Ĝ*6;k<%YݳES tUWP[ ǺƹHˋpv`IuRěz>OkxB| 8=ք<9(ĖNT1s6 =hҹ!2#k]cgy"Byx8oA(4bnZz:5NƢcZjzK9}7؅ASr&fM8QcLDloC \]}˪[..vx?KxyxwY_.vxyz..KeK}FD (-?L0Xs#FL*\T>ݹ6!N%*E;ǿ(ܮ{*D/x3;˫/‰)ޣdK=԰ڗ<: ~6,wc%f :R SEw6sU7y,#eНa |As69cf}p\C !C;U>_ +ָ6u.]Yb $GTqbdSi Gd3n%xOP2 X h*"0o,q!$>q>)Lb㪎7.A5I0;a@6driJO g|-[|늱#$ʰ< oɵgH.Q0~D,\Zۜ_7eSM\2U4#Ȭܡa1"P{Q ﳀW-2Gܳڑ^!O(8󪲫l\Xv0M w}"YkBpP;H =a`؋\"ϥrw;h\ǯP|x\ }bA.bٞCke $Q4!G*'ks.mi7y=Bוb hds<#8T8qUcL,p11)xGC&9uKʽQ x!śD~<ל˛W?\"V6#qJ˱*ۿ Bvv)kU;’~79y`,?.E_G[dW%R1~a8zb@9F;L]ϳc4&%ڕJF 1,cߺUڴLE*KT{}&?-Fp"YUE;6y>5#.AՕϳ܅\᳦釲}ղ'$;X>5mޥB1Z4؄Mh zY\0$8Hb3J(96E {SbQVH1Ib,$Ӣ=bY4Då֎ &H8F$I9lK@OqI1AH#HlPK[4Gp6&),U<%qf0 !gىg(J*~HB**Øw? }aHF ii 5BqGnyhEc'F㠄QFȾudfB!:cSfg1ق-"$5vbk9 Ђ֐ B@c)Cb-CȂWNS@ FRG)n(rc\HI#DZ#!1VH呥lfE9 ߏM|<_;q08Yq2`GXK#{Hk?qSc7*}4>l<K-owjz'6KUH'T!y%-jlM^ ŋ{x߷7Wg-rcR}<[Vj,ƖT$:evpŪu~%ج?ɪhǚʞճܳC?<7V¥)O$ ^˺TpbSMie=VkڢwvQ;?=y63󛻻A /bg:qߧ;ɓ h-̶lm7_^IձW:}P2~wUC4.ӜJkWCu'n{ה]??5K3IS}.h˳dߖM~m5\Wtw|9nm\)lf.Ż7犍x9|U2EXC$QE/*B.esmts(Rpf ^ VwC[7mxqP8Wm2Ψ# 0u6Ye12(?_}lN xq)#>8{#̐5.(M[VP\'e7,0-o>#HaۡNp!iB@ u@ZJJ6?+\J'c1ΉwOB Fqj"hx;вEuD|KHBU,4 5J?=PTbȔRT!+GYx3FT8=l2us[/?sO $X3N8*}hv®qhDņah_ۚQ:ʞcG6\y;Վ9T^L<5=FAoܺ["(?Yq]*_]/.H$mU7$EtUBuA1 ?Zj買F)ZvW_&9DۣJۜke^|&]]ܬOa4)0sK$aՓ{ GYUWO ¹,l&Glw\ ]ǐ/p/TH=9MRݮvH;"Y*1C9fplj]-98/޶m( W2IIݤPV$n $dIٯ{IɲU$EfUWyڂ:J5E^ N]TꓓKOzoPU-qϗEb&py -͌ q3@6iKl~8Z w|+ ȃAނXų6gm-891|gH&mm14edF+V倂\ЙA#³[ؕ%&(Vܻ (E%95Թ/Ο_ ߺq~u@X!|{8X#@a`$V\&ePJ4'Q:'5jHLECĆ\d_XОE\jsAעj/=R˂ PI=JV"%kJ,ޟ~i'N7U] y@=Z]娖r0к>0@,{zJ@ ۘ|6}#?0 xnA1pw9[m]>v8gu,CU)ssZUoCkcXg ߵ}`[蕔yb]+6y? Fz%'i;y}_AA{"7%/`nO P;I@O3gxY{<}sfh GTECN6ox}dWȹ0b_xlvmLu'$ 'vQD0c|L4rҁsj<?UϟjO1T6TdK8(tvōI (=FkJ+tA&W.۽j;t_*]Ϲ/jWԟH5u;pGU!RΦ` VthiNC 4z8FWVڽ+ endstream endobj 15 0 obj <>stream H:` endstream endobj 16 0 obj <>stream H|MKc1oVaàD(tT[ozSsRpBq~-π;wopL7d''yIBs RL~ŕ8C8ܠ)!8Ё)pm/vJat:twBȒ'~|UmYTk.,' g-3sIȤiˌ,(vBVtaRdf6`\m3 .>/JuS[i>7VTz1ft]6ž$gLXUdc[Ġ 7$cvZB'f_Sh1:ó[OI3 "chԖp~ǽG7ǯo.]g>wv5hϯ瞿 g endstream endobj 17 0 obj <>stream H\Aj0 E>3!ʦh8(")ոA93<WvNTU.]lےqhi@dgoMpg7H -xeЫMovFt^0-!ԥ~øqI![P5FEUH~P,w%ncjSʭ̒#ǚRL ~ԏao endstream endobj 18 0 obj <>stream Hj`h`e&B 1 endstream endobj 19 0 obj <>stream H\V PUYŅV"T@v+&(`$cũ!ImbL4ژNiMckNwN;/lRE}z[مwa.`=HD:uETXnV/XKW!+V支Q)X :[2?ِhtC{F[T sڻ5ʐ]&Vq(S3O@;c41:2w8"1&&&.?9቉<ܶى7"#_@"piïmKٜ9kФQ]]¬ԐJ\qJBe'Jg?١۫wu~'`d.}_Xs'*)>}jÒm»OI0R3|!]*|܅{ \1hߠ \7Kwkpi:D ""#'7G(HcիGL}N|36r![V/ \w>^3|O-y]^e: ~ҧ}p>?TeK f*_X}|#=l#X  Q)(9/#NˈDѪ^"ی3|0[um ~nDOOСN@'J/C>1T >fǨכAȕ8Gt8?Y?TQ[]E=r6FS:d:ex&׿zj T,W0lUz>߰)͒8=%S<*FD|1QsN)NC[)V702ys *l2R…5 9U-Zט.L]G(?QH5cwI*RIؠq4/!YuJ5aTmxM!c;γ#(cr7!_5 >&are m;S>#l=X.2Qm@E&esM>X+i20TCGY, .cڊ<+VgJEIj7*>|@[wyˌG[?m{8,PРbnE*4lnyYxSAaMGԝP u%Z.|>785rfk. 1tjz ap@`:yyۦ2Ph<<3҉3k)c`p},/ AJsa{Wh5V_\5=/hqh\AH71ߩ? Bjyʅo! * wu1vȷeI;p~5&О9OXiDq-l3Ð~gLܓ~Y'PD s%^d>yfu&XPa]B",ryA F>że= dBHQ$nb rLՀ%OPǜګ3:$QR"G.ٌYل_^Y6OQvm0wEk5Kw Ә;HS07lA V!Dy֋UB/WaH8wH}{U uefo%6;'!D-}&8FzzdPG/c*@ӗY`~*y_oY/‰uӈlb1﵅w/vH#bblAEjb=+f"+D>d{52o"7 =қuAkb\VJI4nQFUúzu~\Յ+<&v'yTWSXSe^73é@lָCżClD19 43#W20${ a 2o <̾Taz*c)0_u=5gKgc 3{+g}O@K/ w'grM$gs=8OIRS.=k!x8?F]ol{Sc[гG & ՟2ChYSn=IPw$]vTP 49EF:P#qp^vRMY˴[l~dϋojdM<ܳIνu7nӷѫ!.GSɽIo ?M/>գCE䰨âڟ;Ի=l9Ѱ~9ԫa5r]8Fܲ$_{U|%<\;:9'Ч[$НH ՛2;Mq1<.}(A8_[9:GMoe3\]ʹ^3;_nJE m [R-R-R-2"pG$R/r9zغ(km-6_/WF6Q ̓6dEzٔ)J~oP Hq䷇apo]zm[w4wa)l,X./8}&F+8@ʈePe@k,DiX (*Yy.%df@ hA %9_Reio|s%,W` ! endstream endobj 20 0 obj <>stream H\Mk0 :b't!r[I m?&Az%]@?zWssaYiR wJX%4mz2~V;Nvݰ:ܬM7 $;2AWY2qFj@f!/!ZWY5N].b5c幉tlU/ΙLLDOUc]J4=NG5qs.JLvqlk,U|W}x endstream endobj 21 0 obj <>stream application/postscript Print Cynthia Engler 2020-01-20T13:53:15-08:00 2020-01-20T13:53:15-08:00 2020-01-20T13:53:15-08:00 Adobe Illustrator 24.0 (Macintosh) xmp.iid:0761e443-2024-4a7a-a84e-3720c1087643 xmp.did:0761e443-2024-4a7a-a84e-3720c1087643 uuid:5D20892493BFDB11914A8590D31508C8 proof:pdf xmp.iid:954cba83-f0e4-4d2d-af6f-a4cce292e2e1 xmp.did:954cba83-f0e4-4d2d-af6f-a4cce292e2e1 uuid:5D20892493BFDB11914A8590D31508C8 proof:pdf saved xmp.iid:bd9b31f3-e019-4844-ac70-2d879f84f132 2020-01-20T13:25:25-08:00 Adobe Illustrator 24.0 (Macintosh) / saved xmp.iid:954cba83-f0e4-4d2d-af6f-a4cce292e2e1 2020-01-20T13:27:43-08:00 Adobe Illustrator 24.0 (Macintosh) / converted from application/postscript to application/vnd.adobe.illustrator saved xmp.iid:0761e443-2024-4a7a-a84e-3720c1087643 2020-01-20T13:53:15-08:00 Adobe Illustrator 24.0 (Macintosh) / converted from application/postscript to application/vnd.adobe.illustrator EmbedByReference /Users/cengler/Desktop/cynthias active jobs/CS447710192_Sentaurus Lithography DS/links/CS447710192_fig4_screen.psd xmp.did:c32397ab-3516-42c7-b661-7179c2c220d6 xmp.iid:901568d5-82e4-40b6-baab-a0af4ef84f1f /Users/cengler/Desktop/cynthias active jobs/CS447710192_Sentaurus Lithography DS/links/CS447710192_fig4_screen.psd xmp.did:c32397ab-3516-42c7-b661-7179c2c220d6 xmp.iid:901568d5-82e4-40b6-baab-a0af4ef84f1f Print False True 1 8.500000 8.500000 Inches Cyan Magenta Yellow Black Default Swatch Group 0 White CMYK PROCESS 0.000000 0.000000 0.000000 0.000000 Black CMYK PROCESS 0.000000 0.000000 0.000000 100.000000 CMYK Red CMYK PROCESS 0.000000 100.000000 100.000000 0.000000 CMYK Yellow CMYK PROCESS 0.000000 0.000000 100.000000 0.000000 CMYK Green CMYK PROCESS 100.000000 0.000000 100.000000 0.000000 CMYK Cyan CMYK PROCESS 100.000000 0.000000 0.000000 0.000000 CMYK Blue CMYK PROCESS 100.000000 100.000000 0.000000 0.000000 CMYK Magenta CMYK PROCESS 0.000000 100.000000 0.000000 0.000000 C=15 M=100 Y=90 K=10 CMYK PROCESS 15.000000 100.000000 90.000000 10.000000 C=0 M=90 Y=85 K=0 CMYK PROCESS 0.000000 90.000000 85.000000 0.000000 C=0 M=80 Y=95 K=0 CMYK PROCESS 0.000000 80.000000 95.000000 0.000000 C=0 M=50 Y=100 K=0 CMYK PROCESS 0.000000 50.000000 100.000000 0.000000 C=0 M=35 Y=85 K=0 CMYK PROCESS 0.000000 35.000000 85.000000 0.000000 C=5 M=0 Y=90 K=0 CMYK PROCESS 5.000000 0.000000 90.000000 0.000000 C=20 M=0 Y=100 K=0 CMYK PROCESS 20.000000 0.000000 100.000000 0.000000 C=50 M=0 Y=100 K=0 CMYK PROCESS 50.000000 0.000000 100.000000 0.000000 C=75 M=0 Y=100 K=0 CMYK PROCESS 75.000000 0.000000 100.000000 0.000000 C=85 M=10 Y=100 K=10 CMYK PROCESS 85.000000 10.000000 100.000000 10.000000 C=90 M=30 Y=95 K=30 CMYK PROCESS 90.000000 30.000000 95.000000 30.000000 C=75 M=0 Y=75 K=0 CMYK PROCESS 75.000000 0.000000 75.000000 0.000000 C=80 M=10 Y=45 K=0 CMYK PROCESS 80.000000 10.000000 45.000000 0.000000 C=70 M=15 Y=0 K=0 CMYK PROCESS 70.000000 15.000000 0.000000 0.000000 C=85 M=50 Y=0 K=0 CMYK PROCESS 85.000000 50.000000 0.000000 0.000000 C=100 M=95 Y=5 K=0 CMYK PROCESS 100.000000 95.000000 5.000000 0.000000 C=100 M=100 Y=25 K=25 CMYK PROCESS 100.000000 100.000000 25.000000 25.000000 C=75 M=100 Y=0 K=0 CMYK PROCESS 75.000000 100.000000 0.000000 0.000000 C=50 M=100 Y=0 K=0 CMYK PROCESS 50.000000 100.000000 0.000000 0.000000 C=35 M=100 Y=35 K=10 CMYK PROCESS 35.000000 100.000000 35.000000 10.000000 C=10 M=100 Y=50 K=0 CMYK PROCESS 10.000000 100.000000 50.000000 0.000000 C=0 M=95 Y=20 K=0 CMYK PROCESS 0.000000 95.000000 20.000000 0.000000 C=25 M=25 Y=40 K=0 CMYK PROCESS 25.000000 25.000000 40.000000 0.000000 C=40 M=45 Y=50 K=5 CMYK PROCESS 40.000000 45.000000 50.000000 5.000000 C=50 M=50 Y=60 K=25 CMYK PROCESS 50.000000 50.000000 60.000000 25.000000 C=55 M=60 Y=65 K=40 CMYK PROCESS 55.000000 60.000000 65.000000 40.000000 C=25 M=40 Y=65 K=0 CMYK PROCESS 25.000000 40.000000 65.000000 0.000000 C=30 M=50 Y=75 K=10 CMYK PROCESS 30.000000 50.000000 75.000000 10.000000 C=35 M=60 Y=80 K=25 CMYK PROCESS 35.000000 60.000000 80.000000 25.000000 C=40 M=65 Y=90 K=35 CMYK PROCESS 40.000000 65.000000 90.000000 35.000000 C=40 M=70 Y=100 K=50 CMYK PROCESS 40.000000 70.000000 100.000000 50.000000 C=50 M=70 Y=80 K=70 CMYK PROCESS 50.000000 70.000000 80.000000 70.000000 Grays 1 C=0 M=0 Y=0 K=100 CMYK PROCESS 0.000000 0.000000 0.000000 100.000000 C=0 M=0 Y=0 K=90 CMYK PROCESS 0.000000 0.000000 0.000000 89.999400 C=0 M=0 Y=0 K=80 CMYK PROCESS 0.000000 0.000000 0.000000 79.998800 C=0 M=0 Y=0 K=70 CMYK PROCESS 0.000000 0.000000 0.000000 69.999700 C=0 M=0 Y=0 K=60 CMYK PROCESS 0.000000 0.000000 0.000000 59.999100 C=0 M=0 Y=0 K=50 CMYK PROCESS 0.000000 0.000000 0.000000 50.000000 C=0 M=0 Y=0 K=40 CMYK PROCESS 0.000000 0.000000 0.000000 39.999400 C=0 M=0 Y=0 K=30 CMYK PROCESS 0.000000 0.000000 0.000000 29.998800 C=0 M=0 Y=0 K=20 CMYK PROCESS 0.000000 0.000000 0.000000 19.999700 C=0 M=0 Y=0 K=10 CMYK PROCESS 0.000000 0.000000 0.000000 9.999100 C=0 M=0 Y=0 K=5 CMYK PROCESS 0.000000 0.000000 0.000000 4.998800 Brights 1 C=0 M=100 Y=100 K=0 CMYK PROCESS 0.000000 100.000000 100.000000 0.000000 C=0 M=75 Y=100 K=0 CMYK PROCESS 0.000000 75.000000 100.000000 0.000000 C=0 M=10 Y=95 K=0 CMYK PROCESS 0.000000 10.000000 95.000000 0.000000 C=85 M=10 Y=100 K=0 CMYK PROCESS 85.000000 10.000000 100.000000 0.000000 C=100 M=90 Y=0 K=0 CMYK PROCESS 100.000000 90.000000 0.000000 0.000000 C=60 M=90 Y=0 K=0 CMYK PROCESS 60.000000 90.000000 0.003100 0.003100 Adobe PDF library 10.01 endstream endobj 22 0 obj <>stream Adobed!!##!,##!.333.!>BBBB>DDDDDDDDDDDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDD#C!"   g!1A"Qaq2RS#3BTbr $%&'()*456C789:DEFGHIJUVWXYZcdefghijstuvwxyz !1AQ"2BaqRSb3 #$%&'()*456789:CDEFGHIJTUVWXYZcdefghijrstuvwxyz ?xXI41y+V,g bfmMjfqkL@D h7s Nĭ6Az/~mZ\l# wfxAgokAK7XZ"Dvނ@饢YN6+UV/X~Y+w }ʂʇ3ɉ /Si!ZRIL^ONHe5jv#tY+^8JlmO2q>y77`K05q>yZ,.uCݾ E ̌ǛV<¦J!B!B!B!B!B!B!B!B!Bi5 po&V蝚D-[8>3{vERR@x$5-EӢ i`#7p崵ưs8^路i-Crn8nXn-Έ%eưsxƚ-kw=0K.pqnK}KseEưs5.&!i9crt?fFfK fu h HΚ-bJw&K0m6fFfKy?!{oDkh g;nqlN:CcZ}ǰ~ T-t"[FQ@ ܧ ʆDz2uy4ԕmm hӤGJ^Iә͘-vq16 `Np/)L*bǒ/VXuOdiQ=ETct5,oT1̷c(&SÈfFnB_Ed*9+nJZ[Z"6 L򯅒t! ,-2Ml[ր'@^9@,FQB;SdvRM`tF;,C3ѩ"mNuYbf,ϲ!+9J1n!# >\CiinVFe6lrBg!*S9{ɞzH(Taû? X[i9}KYC "d<;kDaE@f.kI٦~fc~K>SzN/mGdBatWF!ӥw2JrIi 4Ye.)L썟lÁE@EEyi&8eHldT>1PӯNĬx+Kr^{vxȻI#`f4F88>pŶ^b[OK=.9 5r絡4C1v} _qᔢN!p7]oM LWiT}--Lח[%;;tזu44E3t 7Ut&ig`xޘmϤ&TG'#/]i5q kX06BuD!B!B!B!B!B!B.5!B!B!B! w0-m9pa,R^F9h-B Ufy.=Ӹ/,! Fd.6N|#.lOqJ4@Oa]*DXV tY mәBBaѲQp♽CGfQ.!- 2; lԣ)5zd!^hpt!d\[뺇6p_WHTlF܋* jC#]狡 B!B!BȡBJFf0ȍWQw?Wussd)Q7Kl3%Ѿ乮ˢO,ҊvT v#9jKHwI(1`/sn1/s/V3!w[uO4"vY:ſk[\7"Mж͠4T Hs赶GYPlj} Șҽed׺O4TZVX30]0ʢ9$ 9"Ʃk11 8h4[ד_{粪= 76M=(ܵdTNCuuDkԄ!B!B!B!B!BQ{ GnH! J!B!B!B!B!B(O{nv7(нd +UHht [[;uj$؂nIiQlx=aT:8X]tUNPER+~֗Ft]WUs]ؐWj$u8[|7WUvMom|G+l8^RУ~G ֆ^ZAӗf 8@!ig6#+tZC Ǻ?ULV_0<.){E#per8|Ǜ%ԸX˦P[6G2n!yuD%;;ktڞNT掞3 p "ZNBe}xel) /A$v9=',(uT2x3w"4^JY-xf Up[m%.1AWaH9QJɷ QE8Υ@C~ln6*kaJ|N^پLT(t ~}E8C/¤7r3hզLD1o?5IckD540/ ㎬񭲯m"[nȣŃ;QeZi6dvaiS|X3ϹHbrN1e餮&pܭ+)h%;8篱oh hk|!2B!B!B!B!Bqڝ@YLS!|ƒe+vgV fK,P*^Xk! K頓`8G~ [5 PH&~(wVRT3[ ^!xaf;HFK?nwCF7h{ ˎn.lƒeİ%l m"IP3TMӉX"43neAӬCfA&lnSKF~4im:JDFI杚 Gb+T]6dvd'4Rbbt 6OhY@::01Y6u^q~%tu2i Xf覶1Å--`غf N+s>qM-M+ɍM^rMCL37>FXx! &vTmQA42:Dp:9d/2V:A4^GR~1KS@-K>f8+CI}i&,kӭJԹ!6! <8 L=ie!xIRJb\8KOۤai`0G`9',eW? >ݳ'{}<TrڡTs;*4KUcL֘halc{[_W;(eԊVMk\f:cYK"Q#O="IRP$ZJ,]{{ aTTSOɝ}.rhp-p:fAlZ2kJ 3^IUk'ѻayaj6 V;Gё)y0X(%of6\ gfc"cgZ)ͭo؀a3S60N$[\Qx3nU ЏpD-:uhwx/0iv>-%Ky;`u/diHeK$2BoW:VX !fB<.;Zg@Ku`ة2/a.#acw^6:wM-M例/#<[2y 8f7x+kpH=|M@ouND Zv6ِAZ|Ӓ}g0MkC:zBjDT$vβϋ^<5J,wyȹ3^#Uླྀ1o~{ ewy^a:\1zkƴLNR'< GlB!B!B!B!BHPB&*cm+u/)XG QEMEVh [j4P!2d!B2;Aw0%k{_H76ϭyVw[XKFF}f -J 2n9)10 = Zm#AzBag dWn 6\7kxC_nVkʄ懴3>6?7hȶHvZl.89_ӨyʞDIkoMG3Zbu奄YJ.4k{x6\f!BUPT.g NG;$yg82L=e4u89sA-;ALZ`RD r÷kWT=IdEݕ6tS,SkLHvb$'HM\.7BƂJ*@9¶)Kchv_} lU#{JIMHt-{lrLR@\/xk^ `SМ͵!UM1ֿ(j֞pdU e>c׷[H!4aunqnce(DdkdvIh/[#N'H4Fq{Z; i<4ryiޟDd !-phBĈ"aVߩxAEicl0! Qk(af.܈R\48J,W^ޭ+@Ő OM[Hok3+'މh%ҳ**t촡R–藂Ũ"S!T&S؉6{L/36V,+<A9wտd]/lpD4a4/* qv5j#c%V#9 C3eiJ f$,Az/A%=+^4]&t7D-﷍7a Xci䁎SaE 1#=-,'J,-h6Fĭ#ͺ(-3͞^]P^N~#p-tqyaoKAwEyu%6)ҺLF?C)Ʌt>"/.ES!WOOi ѐE-={$d/($Ds%-2Wh[EюCE0c$X t%^ ߙg1^v8V kcff}#F[ ^+~8T~*+*ev=Q kώ{x(tWd6D*s/bG{:>sG]ntR[t*{i=^`oδqqwUvkR(mk"[h%IBZ!B!B!B!Z+*MNM$9q{.$=^8@*V Z`M!N!BJ@r/nU=/[Zs&[*enmyoՒƧ,KuY- ke݋ЄoLoLy}M$0י^|:`p|W7BZtsJ W 6ҫ&ۢY! nß1e`VDnZq-ʇ ;XU׌%t68BlZg|d؎j 3u#7n2*Gc$w4regd68$Ј~R 8[B:"j{$`2enIMV#k|̎yahp 4nxSw`~1'8 ͮ\VqbiFvi( 1:'WW1pI0 H!muB Ќ1iz-,̪Y 3W8 }u,c{)R;@nR2̾SL/3ǀ}U&%Qz).Lejn5NM&Nn-tuLK&%W2 Ұ#6J-9@v8#N_,LK&%S&Ϫvw4٣Z7p.Uw$b'tku0`nܙ~VwKhXkkNpX<L7LKF1XձiB%F!^B*-JF˜uTak0 "UrKa#\uUԚaY': 7C3;&k^ ė(^]^lԣ)5zd! t{+(xCIkW \_}Z'! SM%4푄p}_TDn! M 4U,c7pcC] >F۸(44Vy3s笀{ݠ˾GSR쀥IF3.mM{OkG]վ)RgH-nuPa35fu\Щ{ C[glctZ,:D]eOUuHkA۩0M щC5wD±'N.i>k4Y:Zُ=Q4`>°ڂ<:Q5>-֜ Bx1(N*Jzz3InOjxਧ{5z c胣#G4ĄATU-!NL$Jg2s{-MܕT`Rc'D![ ]Ȏb8S=M9'+_3j4,ͣ/yj@UB!B/F֍d,>2ӨBV1ŏ؂59!{"+DQuv5 rRAm^!Zu!v׵޽ đ9 9is̓iem$ ds$MBhބ,^FkFr ,k04#0B!B!B!B!B!Bi1>WjcI>r7AS#)Zr`w5ΥJWO+v-m@BB-f?Q:RWƻ0`)2Րvq8p4؃cPj +6K$}?4A)hX:7irjBb='-]T^5/&oEovT.ר_Ҳ%5<1߈#kfU è>l#ß+ l7h@(w$"$蔳_3'0 K 8ʚ8 ÜAJTD\2!a竈[I%Bv,^鑐!ED(^WbŵL|Kc lQǭnCy|yǞBiMCt#Aܨ q+Bn@̪CkX jo lQfJ*!hhem% R6Yۡ sh>[RhR9giYs-y &9mkC@kE5BQT=͚L5lr%cgMEU$UlДjFF$njH#K lu=KQ;eJG17ٽVmSIY-v FX[+ c4;1/ιmTXKVG[N٘s9[9D:L8*RP)'B!B!B!B!  qJsܛ ;Uov 跨&`TgNQ+-(B!B7 sr[*ʖ([%;JH@:仺9Y HN~ɢp>zMLĤ߁-b݄(|i,)fZ6]ֶ6aJ,c|h#kK&6,7˴ s3ԐA/\Tt,Qbkӿݣ3WYBzh5\ K\+gUm 嚤j԰&NeZ:, 4i>'v:cCjaq1گ&6Q߆{*;هbZAZuzYӳa Z?E.qj ;۴w8ȥ0x-_p Wn?tw}&~p llR=@4_-J?vx+V/+c%-Wp9<4If#\Z dN:\!hy(|%9*$S=nBٽb^d>æj|T\x_4[8U#CQitE;4}yj+۴`)gnP9Pv[#hpc&iq. Гs sb`}ƢAh5C9dބ2ڧٗmOX) K;dpv>̋LVw) K;dpv>̋LVw)E/GT"#9/ M={٦DA$Aatm86Ni&T)j@YBƱOm4Z++d&Un?oBy-7VTϕ =ڦ6ЀG(ZbT lj tOe3lrj1hdYQ5 vY^*ffZ[%R#EMβJ})4[׵T+L;=. \P&NE^bfDU*wy#ڨN%ϧmE6*j.'i䲲 Ka6ɳ$,s4ɠI _nt>WPB0 dz Ds(n٬XpF^)bu.*֖霏ZYY+"oR4HZmCU&4)ts^,J-PfBt znRN{`h*_p%@'Wt{.u]jXEQRdI9颕Q |o$TBbνxַ۲ JĪ̄LuiPaQ*ӭaƜW lDFea^rjv%)$:»сⶊs7 c^;4Ƅ!gTB!B!B+`1bNJr5/Z&@L8@GGvN$=x+k Xw,swYUjXөjUҌSH Hn%Z8f* kS }HmoY%&GJm0 VxM9jRfBPd(uғGcBWZ =3#jLCsIpٖeZXfp(4c}A莡\.zԪ*H#2G,>qQI݃/H9Z! LBuE/Wh11B{26-cҼZC-({Fds3kiEǘo"rRȆd=iXuvwR85o|89Uyk[ -"kzClxbWwN5cꩍpk (_{g^Zֆk^:b[1͡K\kw'>-s\W Z?^*l~9T^8 :b87UbZ0A2:G/E \߯|9;fn=c_R{ :Mƭ8a7= }i/ gۡ>qD$4܆Bʸn0w;sLpom)bf@dk\nK8 eO!ѝDпNakNZɥ`0U$S2X}rӗyz@"` f`D™'1!PBud${K^|dKG4XfBxq2\DJ2& B4r x:풐"މ#QP+ȕ퉧VnH.74Z*).֖ch Md[ߧsbKzж†!a5=(TI7V@䞀tV2i s {qeu&mDX\e<'A{sr3PzoζRᔬ\N49 #mA5X0^ cfOYVW;!Qһn3*Im\+d-D`]k2!ZB@ `-cicA&Y_"\XF YY7%e)o*@ZDžEgau"KdCNr[ D06by9y%NXA\y*3`.t8c΁i-[m ı- 2(C ߇TI 7jר-%925au*RvsF;TLA0cR`yӒXvQz[ Z)B!B$=6&scۍ[,p}+C֙6u%Fb =HoeL2v.9(Sa?ϢHR-גrm#nl] zXj@E[GJ.$̒pQ hh:'@lp6,DןZcpF!GmSOd-譂hΧ?%JElQOr\ә5u/RNBGE F,Ksj|U2y$֨W.j%j1tsqS^Sm(Xi,7a-=)~mCR8+RԨkf5/:>cơ1Jf0$T^y T΋yx9V%AP\C}? 4VZxboPf#bIkL ^@竧0BTxHD5sFRVG%Lwl2i N3kIV#˵3Wl(N0mHǂFbwFՃۤ:Vm4snR!a"SaM.%+`fvna'MsI덩rd5 VsD'f|!gN!B!B!F |>TS^; 쇢j7/Yp=c>o&q<mͼR斛<y]-iZhm;-԰1s>I,҈v&Ulە1`p->ӈmDҼ-XБJyYLJwB\9t:24* !:IL0V-XwkԖ^V[C "N$YJTtwM醗d\|Mx1蝞kmyakL%J"5rZb4:TTbuuͷ$1cb@kXbip6ݔ+*gC7sB ܫfG h[TZrrn<&!:Bw9Rg09n  s=^^1yj=kԛ%v.*5O#$`:897B=+č%TXJB!B!B!B!B!BOFXy+bU>ٮZz ]L̄!$ObPj`sUC,Fұ= V/9hpT!sB֝a`b FLZ;XtU|`;p,=ͨ GzFҙJx)ֶKQw0%m9p )pJV;4cI3ΪxMWwjCkJnƒLRK] GOJsthf@w{^][x8v9+Äb|dGF%« iFeg̏W!$"M( & $ \}d.,|N ςG`94-{D7ᦋe&Q=ѐul&L?uo5aQGD<ƽ@5Qa@#,'lF }>A_KC`[ww2#Q%òm>r~q1HC͎MEsf52, -:M^UDZZi:z}ET vu vuR!PBTKD]jI'YV^Uk2Z%,]ؕH9(X[Q9%)i"dtaXYbM9t )2Pd`S  %ڞ㢬̉o6khBmgMBdB!UG|V-}}|:b|aGf\ƒHpݘ][b'VűkQ+bY%x@١B̨!BUOLEN NzN XZq~mVƩkSMc$CQmڸOnTck<20\yC+FSG {ㄖxXR3V}]EY!B!B!B!B!B!B!B!B!B!Bl'Uɻt`o/q?&ozeATl0@3fd9s@ENeväq-mv>sw9X6M:R5+ۘY/4p :-e &kq4wSⲼneg ]Qér>rH t|;\[.L.)̑ bٞ /UTBXF7|"MҐN]nH6/m#mò$8afd9j/42j6[f"YU[Vj5&u( &hI~:Ҿp3+nn䫊Pfb h=lKl Ii ]JkuΖ1h8\,sM8e*AŤ1vVxaS0E$m\M 3\|Nx-pL>k]A;t*+Ήe%|kHk ;:мWPB!C|zV8ai\s H6Kux3J۫5tDik{^Wv#5)*p=lR8U?to}a5db':Avdc{-NAF,{kS9$e3{jܴ慄\Nd%nBӾdoysr&!iO27̋5UbZ[[OO2W ѹн[qXT엒ē k+.to}&޷#o][nV]S]VTM 2 ZAKߺ684k$֛f$Jڅ~FЧhڅ~FмvMe#Ks@U3иКccuufv CTL9Z]H6ݤ£E4ר_¨p&9rڞiR?U zR${C]dӹȝ](qm)ƃ %l-\!VYP!B!B!B!B!B!B!B!B!BpeC,-aoQiȻwzc%7 o^S:p k#dcE `Y!xI4S5`@B!B@"0* '9sC$UBW1(Lk^1Uְ7T] yVY+T%pm 4Irq5>iZ-Q|Aah=DڅeYAGA٤V]ऊR!BL y |N(+) 7g4;b9@*(# z uZ4׷hUQnCGAۿеMh(# zhZE&UwAۿv=Ebj-`iZ* z;wB5Z4v]v=DqDQX XhD֊;w8PV 4]kEWqDQQnCV(FB.5(+#UkMhUQnCGAۿеMh`ik8Xx5ElsF̽Et0$!1i*lo6իSiKH&u-^mdWp3B*!B!B!B!B!B!B!B!B!BxB!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B!B endstream endobj 23 0 obj <>stream Adobed!!##!,##!.333.!>BBBB>DDDDDDDDDDDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDD"!"!# #$$# #$$$$$$$,,,,,,44444====DDDDDDCU"   u!"12AQqRSr34BTab #$c %&'()*56789:CDEFGHIJUVWXYZdefghijstuvwxyz1!2AQq"a #$%&'()*3456789:BCDEFGHIJRSTUVWXYZbcdefghijrstuvwxyz ?""" """ """ """ ۢ\;K:+D@DDм""" """ """ """ \\" ""%k:Cyd"ֽ.VY҄rO6!vآUS]Jm8N7F3 sGj3I%R *\< M8iۢgSd8x/JS&Z"񊪚` R"V="QDDD@DDD@DDD@ô\;K:+D@DD88(-f^B/4ؗfer[[_D.Uz*FECۧg/f;;H{M;rX泌f3J%mZP,-8-ʨAXR5BbˋH*iRkۺ)]F k&<ЮxWډ٤v^jKɺzV)o#dܓ[ 4\fx׬lBUkQܓ*-JlP%#X͹aŚt`ɛ}rNɽI#ڵKE^mW*" """ ""isGErv4tW(" """ ?Ӆ>9FÕpаiIE{(l5[}"%Čx#׽ʀ+yetSjP!sBJӂֻT T= B.,cߙ:.3GEY&-d, f7Şy'\BwSVU͕M=LMI&n`|+\6,w(ŅKTE1 \2feJc({Y8,o3"U2z,'(cZJJ{"Tvd$dmq}%|O.:K]T7geOGZӓ}=DB$UkԲĚcl얓lf{^d%iTԢ+ |aX[WA6ZlwZ:9Ѵ AZ9I)pDDD@ô\;K:+D@DDE'N t1ԂpRm{kbg(E IjTrQRi,ŭr*Q2;3Y{dV)Pl CsFQhvr[W$& #c[J 4+4(ST#(/fAI|<(|贫*a~7:FE"r׽VInT5˺9\fīcZрhJSUrX&*޳:% Qɥ~fy|orIIVjK5VBp>̚7>ڹ;X*ʶ;23>,-{һ)5K-bDU" ""\\""" կ.̑Ը)Ԍ:F4 ZA[U [Aqp.²qyѽGAqLbMev ݵP[mb:Iftz^]g'NwXچ.:vQlye& Ǽ\E :33.1ii<%VhGL̃đ|`љqzATBk\ PQͼџ3K.A fm;ix)ocd3c379 9t|>tՁTX]IEp;E:ziYȣOMfxq '#4v,Q󧦙|>ֲi91Ӵ,󧦙围>ֲi91Ӵ&螚<3wwMd1AUA׵SP]vkf:*FHX1:d7l+=]eY3e.W D?*`@G̬К;2{pkzg-D8 BOu%Aeg."Pp6YqF*- d]7׫jv.n ̇5شX`vjn]2fhVtݰ,a k7-7\5w]TE<Kꍆ n9+ pj"\4kHҽ!ZpY0-x6 L3>05y8tX[IVz, խJE(S3Լ,u/.3SwXթ0OZ9YVQߨ#Iq^yGƞx'w&~O;(geyAHgoi;Q3ߨyGƞx;( Ew43LEB9{Ǚs)X83GXRpd$s{i˪i.U&hB]Kˬ;R8te""2yK^٥*ĠAI 3>:.U`fbO NcR)t:`E%L-l"Ab1!Hd+(g^A8gNv\dpG:#>HyЖUEx/p-^TDyA) 5ɩ~xRLd̚9c<;@K(L@}]_^ܑ/lKʱYW)̈ٚ,q`.tO8XKZ%Ι},Cb p:att%zVø\ٺp>c&ij9G|28#䇝 e_^rb2(cC|swJs;5*5I-nHeatQo K(†*)_ ZY $2qNQaGU neJQUgSDDSjVFVʔMvv^&vWVM%$䬍=xU);ˆVSX(y%/:I'EBCgLEk$-Һl3RZ$ƣU &X0<-lkeZD i.6)dymW6RS6ci@:Tf-$ĹK'SJ՝-%c҃YNHu{ˁ-m4ḇ[Yֱ\JDQ6z^]g޺YCS$]!D@pd4 X05ӺC _n7Y*vkJjI4 mHSed +/p6At9B \;n"%zQ)i*<{[';UdK %-9C9ޢl]6mKNx]Ʀx]ƪ%J %-4\lx*2lN$WD ^D<$kd<4\l*%J %-l ' 獱osm0!U,WQ)v*'pFSUo03XYm c ""DEDi(9E$/cNvEj-aj!~g7lT٤KfF{6픤VM+E+PϢ¶vsWnε"f1dѝhzT /U|t-\IXJJ"Y j p2[l;9 p,$ՕNt-- 4<"uY$R-Tl/sfluy_@Α"`OT*8sqŕqq'Z˷gZ.MT4rkK uVpLo#NYKZ:" ֆН^yv[x׀񾼃" 켂mFTrʨrN\EN qj+ m-Umq,l[TKY(<_pة9stym5-/VTTGrMjHQQ5nԪrO\X כ|$cm5Pgi*&lUE,`F LjaLJ5kwSeQh,$TI,jVeXT.("sZ`qm8Is']`\+sDlʨY8hl307:K>< ̼YQr$ȦVut""MLK3pwP)韓3!kL$ڛ@DRe skxӃ4 - ,]"q2"&SombQa5 `B\l$QSY|.p]k1p Kgo ka^G3-4:jÛQTR̗]IYx).eર Rrbs\:9ay*S jt[pv k?- HF7rkf6y,SwK/ҝk $w vRuXr%iY^47 Һ< 9kC#K-MZD  .8 ѓ|l>3D"J%1-n[˷h϶44Ӷ(*H#geJTJZӡ@DD˜4\sYnXq+--L}ٶҮJ AXGmSK#}t!L.&Z!:*[H%1D. ; 'IV:eK]" &NE T4Wju@"4*HEcvAz.4pʗ8J^ 6\2vl۩t"^ZK6^p9Pۘdkư:QU"iH"*" 2jic-4ԴE;r]/j*U: HpDDB(+%$;IaMDGWRGƻSGS$Ӿ>iڴ܈)ڗk%=$i]ҳA6&)ò⬦6ǔS"7qǝɱ8۴Yc^w#"?U[(HhlD b.;t 0۰,A7^ б3C%En$rʩ` RL[qiYO0$ ճ$li X:ax \o+.E8E [o2U a}e܋8X>(,IjDZ*&E2l;+6t3YNie"jW>*ӓl,fD$|Nm!dPQG Vp5ɰmT{RɟXY $pţ,(a2\sRș RsLRsSL#tH#4|rY[2i,vK ,Svpu,fv"{:O~/Xtm'@WXz鼨\tD@DDj!(ƻ*]C3K݋iJW;i,,Z㤣grj e%d̺IbѮv6DNyNyvuPrziTnsùI53ùI5NΪB7OM3Axw)9Sv@*&uPrzj`4`@Ѽ""" ""ZZiŦhgJIk]'7 ˢQƚPV6\8uP9e.fkZxf:JY QUG: Jؚ Ӓ ;^Z&{VuN\ ` NDEW)ocJr\qSk(iT7(1ME*ϔ*r ŹY`-S8{>S8{>P3 Ҹ*ϔ*ϔ9{L=t33ySڴ9Oq>q>1;'Æҷr0y5<+6^x[Q }dii( yY#CNӀ:_fz0C.끪K+Gƍ>kLҳqq%GƍDDҼ""" """ 8 hqp2D@DDD@DDD@DDD@DDӼ""" """ """ """ """ "" endstream endobj 24 0 obj <>stream h޼[J?,8^FH6N"04s"c ytש{kWTBL׼>%yڧ*{.TצRTcriSjΫ8~42R#h*szdEwT;kq$w?AY[ŏ zLuAm-)dKZ!9j/Wi^ Kq@b$EVګbҟk^esXR,tMI}phBBEh ,d?f 01+sj:Ibc]zSc1NgIkvuJ0I^elhi챖M*36y6uu2 u)-ZXۚ 4՚IX]N-a֩on&*ր8JhsYR0ISҮ[FoX^5>`ZIn! #|YeXLr Y3r52KCX2 *KF(@dzY3pKnJa$u&V̎ٓ&Td8KMMCtZۘ_Lٰ ~-]^fAhP#dnQͣȜ5F^> F⸱<] ReY4<$a$߀J N(.XJ`xGWp]{wsJ>ۼ>C:c\EubOOy A|2` :t:t7Lq΂rxV2(Nʀ"AHXu RV> # 4j3:PAIueҊ#Eiuq$e]3&[0Ч˽`S#6s׉LFiLYK 6g=NSθ!3eІoW,AȃN:b ,蔎j Ǹo32 Ȝ)Us!R#=}Sm%Vy(I\UFգ!'#Mvd$wr#q.")gARzāB+侜` >yH ~6$-1GWրoxAۍH6l7$ar+葼|Ţ e'X(ھXϾX%h8}g+sOߟoF?B巊*.O_]7BዯVPɏREVasXD\jٔ?;=Ӿ_wxno=xu}s˝nWwvpջ=& endstream endobj 25 0 obj <>stream hޔQk0ǿ=nz֎"lB:jdE4"~%({S` |b0aM}qrHsƛ(Q'8#oQ2'mE-az%D*+:㺔+=#LjyfjOIpMm?%ƣmE]̧vx^&J͹ԗ)e;8X;b1&]'p'|,uD nBXqJY޻7ľv UC> ȉ endstream endobj 26 0 obj <>stream h25T0Pw/+Q0,H/-K-0 endstream endobj 27 0 obj <>stream hYnFOC̾_qfrlRa(qX ?E ),6A`NWץ pNFA$鄋`I&Ku+aTka4a";awj@(a"|&Y(ATJ-RbZ( ^XL$B ku!b 3^D9<"1"G'b}^:F>ŘD2#J㤄#%ᴡdK%&y2<|`̥$@rfSɐ'' ) ,/6ܣ^k +8DJP 2^K9y~ [,X;Yi CECB5#d$5YXA'ef X>D"#l R[Ij`Az⁗efF( D C*Ж1V`hVѣ9X,WY&R  "V {r@B$#)怜`*NOY|⪘PRt.7uYR~(Lgካղ>̟?l~|WǍG,ϫ'0#ŧr ُ6B!Rj t!۠}ؔkdfW٫Z9~cţcq ۀP>(Ӄ`wTW䇭`gzs&Y!/ CoO.Hڧ)__~;{SLg/O|t Pt$Ћ3^  bTMݲ$ZO/N>7bZ/~w{r9_d4]^wWS$NtݭlZ?nSWI=Dwx^E2r)Gpy`+2LRZrdТI'Z2TL9cjj\Ģ *ldȲ3um0!q_8qa7{v3{9<]HyT{,Y%cQqUk Vϛbr?Q{QUp91cޠuuZ\Pd;jMs>˙ڭ&w*vqd|T,Psm>Ɏwgmo bJ==$ʈm ڎR{_3꺈g::iަorCi5u<*) v Yrӹ,B{w/s Y4BM+p .ͅ 0Ϙ5{,OV* L*́-g7dMuYMhJe]nkbU`GPQm+VzPz//<84HWi[Q]KިQx;$݃`HҦx(t.Qrus.p{:p.+9tCRSN)϶"!f:$Rd;N/MǫyQ3M.3TKlTxqjU/@̬*V֪xu}%.l:3V+ /3ۖ$[rP6PdV?@A=Sf}&6or7u9:ohz"slHRﻪzi[-{QMr6P1ÌZ*{^I}їeꏚO集eɼtxY0cUCT돽]s"[$/SoG[iZmQ2y[sL/ҵ/{߼@1'_gjwYey/kFz?m^VjcwNnrkm1`Up endstream endobj 28 0 obj <>stream hބMo7Sxl/Zc8@`nMrr}P5J!o;/Y3ڈ:fygș%iJ켣\f٬8*1Xe .m4.2lrѴKV\ % x'Df vƖJ4DWJ0lv`ũZ9%W86,恄c$pacS\)3,R)6DD.jOjl+-Tu N"؇N<8j4? BB:Vݲ`:Le- tIbI tIGT(괸>stream False 11.0 8.25 4 2020-02-10T20:34:44.094-08:00 Adobe PDF Library 15.0 8ac89009a905811f22c12240ad536d84e4cc9126 395993 Manufacturing|Smart Manufacturing;Manufacturing Datasheet synopsys:products/manufacturing/smart-manufacturing synopsys:content-type/datasheet synopsys:products/manufacturing Adobe InDesign 15.0 (Macintosh) 2020-02-10T20:30:50.000-08:00 2020-02-10T20:30:50.000-08:00 2020-01-24T10:23:12.000-08:00 application/pdf 2020-02-10T20:35:23.800-08:00 01/24/20.CS447710192_Sentaurus Lithography DS sentaurus-lithography-ds.pdf xmp.id:bc746f9b-52d4-4576-b925-c2715f9c1427 xmp.did:c0419ea7-b48f-4fd1-87ac-195b338aad28 proof:pdf uuid:a3cb0c3e-c610-4bcf-9807-402ca319442c xmp.iid:3dec50d6-0279-452b-89e2-106845451680 xmp.did:c0419ea7-b48f-4fd1-87ac-195b338aad28 default xmp.did:5c276067-326c-4a3a-b6f3-7688931660fc converted Adobe InDesign 15.0 (Macintosh) 2020-01-24T10:23:12.000-08:00 from application/x-indesign to application/pdf / Adobe PDF Library 15.0 false synopsys:products/manufacturing synopsys:products/manufacturing/smart-manufacturing synopsys:content-type/datasheet endstream endobj 30 0 obj <>stream h222T0Pw/+Q0L)622)IsDT$c endstream endobj 31 0 obj <>stream hތJ0_%%Hc:@HdmKJ 6FE˓?NZ.i 5Bł`;kd:Km#CIs':D&V iaMoV~4{d7_$D*$޵ͮe,~d/,ޡ2As)?t Pvg݆MnиZ} 0T endstream endobj 32 0 obj <>/Filter/FlateDecode/ID[<50D0A4822AB8B2110A00700A0439FF7F>]/Info 222 0 R/Length 173/Root 224 0 R/Size 223/Type/XRef/W[1 3 1]>>stream hbb&F;A$ 8Ėz"HjK 5@l& "kjAz!X?dD{)g@d(HQ+ -o`X@X|&X$]a<`R+`J$J;dg endstream endobj startxref 116 %%EOF